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| Presentation | 2005-04-22 15:20 Fatigue characteristics of the Si moveable comb inserted into MEMS optical devices Takayuki Shimazu, Makoto Katayama (SEI), Yoshitada Isono (Rits) Link to ES Tech. Rep. Archives:  CPM2005-6 OPE2005-6 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | This paper focuses on the fatigue characteristics of the single crystal silicon (SC-Si) cantilever in relation with the critical design of micro electro-mechanical systems (MEMS). Development of MEMS actuators for optical communication usage is carried out successfully, for example, in optical switches and variable optical attenuators (VOA). In those devices, fatigue characteristics of the MEMS structure are crucial to its practical application. However, fatigue tests using real structures have not been carried out well. In this research, the fatigue life has been inspected at the actual device, under actual usage conditions for the first time. We obtained fracture rate λ from experimental results, and the value of Failure in Time (FIT) λ was about 0.3 FIT. This result indicates that these MEMS devices having enough reliability for practical usage. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Silicon-cantilever / Fatigue / S-N curve / Weibull distribution / FIT Number / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 105, no. 26, R2005-6, pp. 29-32, April 2005. | |
| Paper # | R2005-6 | |
| Date of Issue | 2005-04-15 (R, CPM, OPE) | |
| ISSN | Print edition: ISSN 0913-5685 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | Link to ES Tech. Rep. Archives: CPM2005-6 OPE2005-6 |
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| Conference Information | |
| Committee | OPE R CPM |
| Conference Date | 2005-04-22 - 2005-04-22 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Packaging and reliability of optical componetns, etc. |
| Paper Information | |
| Registration To | R |
| Conference Code | 2005-04-OPE-R-CPM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fatigue characteristics of the Si moveable comb inserted into MEMS optical devices |
| Sub Title (in English) | * |
| Keyword(1) | Silicon-cantilever |
| Keyword(2) | Fatigue |
| Keyword(3) | S-N curve |
| Keyword(4) | Weibull distribution |
| Keyword(5) | FIT Number |
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| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Takayuki Shimazu |
| 1st Author's Affiliation | Sumitomo Electric Industries, Ltd. (SEI) |
| 2nd Author's Name | Makoto Katayama |
| 2nd Author's Affiliation | Sumitomo Electric Industries, Ltd. (SEI) |
| 3rd Author's Name | Yoshitada Isono |
| 3rd Author's Affiliation | Ritsumeikan University (Rits) |
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| Speaker | Author-1 |
| Date Time | 2005-04-22 15:20:00 |
| Presentation Time | 25 minutes |
| Registration for | R |
| Paper # | R2005-6, CPM2005-6, OPE2005-6 |
| Volume (vol) | vol.105 |
| Number (no) | no.26(R), no.27(CPM), no.28(OPE) |
| Page | pp.29-32 |
| #Pages | 4 |
| Date of Issue | 2005-04-15 (R, CPM, OPE) |
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