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Paper Abstract and Keywords
Presentation 2005-04-22 15:20
Fatigue characteristics of the Si moveable comb inserted into MEMS optical devices
Takayuki Shimazu, Makoto Katayama (SEI), Yoshitada Isono (Rits) Link to ES Tech. Rep. Archives: CPM2005-6 OPE2005-6
Abstract (in Japanese) (See Japanese page) 
(in English) This paper focuses on the fatigue characteristics of the single crystal silicon (SC-Si) cantilever in relation with the critical design of micro electro-mechanical systems (MEMS). Development of MEMS actuators for optical communication usage is carried out successfully, for example, in optical switches and variable optical attenuators (VOA). In those devices, fatigue characteristics of the MEMS structure are crucial to its practical application. However, fatigue tests using real structures have not been carried out well. In this research, the fatigue life has been inspected at the actual device, under actual usage conditions for the first time. We obtained fracture rate λ from experimental results, and the value of Failure in Time (FIT) λ was about 0.3 FIT. This result indicates that these MEMS devices having enough reliability for practical usage.
Keyword (in Japanese) (See Japanese page) 
(in English) Silicon-cantilever / Fatigue / S-N curve / Weibull distribution / FIT Number / / /  
Reference Info. IEICE Tech. Rep., vol. 105, no. 26, R2005-6, pp. 29-32, April 2005.
Paper # R2005-6 
Date of Issue 2005-04-15 (R, CPM, OPE) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF Link to ES Tech. Rep. Archives: CPM2005-6 OPE2005-6

Conference Information
Committee OPE R CPM  
Conference Date 2005-04-22 - 2005-04-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Packaging and reliability of optical componetns, etc. 
Paper Information
Registration To R 
Conference Code 2005-04-OPE-R-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Fatigue characteristics of the Si moveable comb inserted into MEMS optical devices 
Sub Title (in English)
Keyword(1) Silicon-cantilever  
Keyword(2) Fatigue  
Keyword(3) S-N curve  
Keyword(4) Weibull distribution  
Keyword(5) FIT Number  
1st Author's Name Takayuki Shimazu  
1st Author's Affiliation Sumitomo Electric Industries, Ltd. (SEI)
2nd Author's Name Makoto Katayama  
2nd Author's Affiliation Sumitomo Electric Industries, Ltd. (SEI)
3rd Author's Name Yoshitada Isono  
3rd Author's Affiliation Ritsumeikan University (Rits)
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Speaker Author-1 
Date Time 2005-04-22 15:20:00 
Presentation Time 25 minutes 
Registration for R 
Paper # R2005-6, CPM2005-6, OPE2005-6 
Volume (vol) vol.105 
Number (no) no.26(R), no.27(CPM), no.28(OPE) 
Page pp.29-32 
Date of Issue 2005-04-15 (R, CPM, OPE) 

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