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Paper Abstract and Keywords
Presentation 2005-12-22 14:25
Optimization of poly-Si TFT for controlling field emitter arrays
Chiaki Yasumuro, Yuuichi Sakamura, Masayoshi Nagao, Hisao Tanoue, Seigo Kanemaru, Junji Itoh (AIST) Link to ES Tech. Rep. Archives: ED2005-186
Abstract (in Japanese) (See Japanese page) 
(in English) We have already proposed thin-film transistor (TFT) controlled field emitter arrays (FEAs) to improve uniformity of field emission display.
The important features of the TFT for emission control are high withstand voltage, kink free, and low off leakage current.
In this article, the structure of poly-Si TFT was optimized in the view point of controlling field emission current.
The multi-gate structure, lightly-doped drain (LDD) structure, and their combination were tested.
We found that the channel length should be more than 50 um for kink free characteristics and that the combination of multi-gate and LDD structure is effective for high withstand voltage and low off current.
By using this optimized structure, the TFT-controlled FEA was fabricated and successfully operated.
Keyword (in Japanese) (See Japanese page) 
(in English) Vacuum nano-electronics / field emission display / field emitter array / poly-Si TFT / / / /  
Reference Info. IEICE Tech. Rep., vol. 105, no. 498, ED2005-186, pp. 21-26, Dec. 2005.
Paper # ED2005-186 
Date of Issue 2005-12-15 (ED) 
ISSN Print edition: ISSN 0913-5685
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF Link to ES Tech. Rep. Archives: ED2005-186

Conference Information
Committee ED  
Conference Date 2005-12-22 - 2005-12-22 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2005-12-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Optimization of poly-Si TFT for controlling field emitter arrays 
Sub Title (in English)  
Keyword(1) Vacuum nano-electronics  
Keyword(2) field emission display  
Keyword(3) field emitter array  
Keyword(4) poly-Si TFT  
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1st Author's Name Chiaki Yasumuro  
1st Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
2nd Author's Name Yuuichi Sakamura  
2nd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
3rd Author's Name Masayoshi Nagao  
3rd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
4th Author's Name Hisao Tanoue  
4th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
5th Author's Name Seigo Kanemaru  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
6th Author's Name Junji Itoh  
6th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
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Speaker Author-1 
Date Time 2005-12-22 14:25:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2005-186 
Volume (vol) vol.105 
Number (no) no.498 
Page pp.21-26 
#Pages
Date of Issue 2005-12-15 (ED) 


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