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| Presentation | 2006-03-03 15:00 - Akinori Hashimura, Kunihiko Nakamura, Yasuyuki Naito, Yashito Nakanishi (Matsushita Electric) Link to ES Tech. Rep. Archives:  MW2005-185 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | This paper proposes the investigation of high Q torsional-mode MEMS filter that can be integrated in RF front-end for future mobile terminal applications. We have focused on resolving the issue of support loss in micro-scale beam resonators to improve the Q factor. A torsional-mode beam resonator that was fabricated using anisotropic etching by crystallization technique demonstrated the Q factor of 14600, which is 2X larger than achieved by the flexural-mode resonance counterpart. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | MEMS / filter / resonator / torsional-mode resonance / single-crystal silicon / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 105, no. 626, MW2005-185, pp. 39-42, March 2006. | |
| Paper # | MW2005-185 | |
| Date of Issue | 2006-02-24 (MW) | |
| ISSN | Print edition: ISSN 0913-5685 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | Link to ES Tech. Rep. Archives: MW2005-185 |
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| Conference Information | |
| Committee | RCS AP WBS SR MW MoNA |
| Conference Date | 2006-03-01 - 2006-03-03 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | YRP |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | MW |
| Conference Code | 2006-03-RCS-AP-WBS-SR-MW-MoMuC |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | - |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | filter |
| Keyword(3) | resonator |
| Keyword(4) | torsional-mode resonance |
| Keyword(5) | single-crystal silicon |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Akinori Hashimura |
| 1st Author's Affiliation | Matsushita Electric Industrial Co., Ltd. (Matsushita Electric) |
| 2nd Author's Name | Kunihiko Nakamura |
| 2nd Author's Affiliation | Matsushita Electric Industrial Co., Ltd. (Matsushita Electric) |
| 3rd Author's Name | Yasuyuki Naito |
| 3rd Author's Affiliation | Matsushita Electric Industrial Co., Ltd. (Matsushita Electric) |
| 4th Author's Name | Yashito Nakanishi |
| 4th Author's Affiliation | Matsushita Electric Industrial Co., Ltd. (Matsushita Electric) |
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| Speaker | Author-1 |
| Date Time | 2006-03-03 15:00:00 |
| Presentation Time | 20 minutes |
| Registration for | MW |
| Paper # | MW2005-185 |
| Volume (vol) | vol.105 |
| Number (no) | no.626 |
| Page | pp.39-42 |
| #Pages | 4 |
| Date of Issue | 2006-02-24 (MW) |
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