Paper Abstract and Keywords |
Presentation |
2006-04-21 13:25
Mechanical Dynamic Gain Equalizer using MEMS Actuator Array Ikuo Kumagaya, Nobihito Kinoshita, Satoshi Konishi (Rits), Tomomi Sano, Makoto Katayama (SEI) Link to ES Tech. Rep. Archives: CPM2006-2 OPE2006-2 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
This paper reports MEMS based mechanical dynamic gain equalizer (hereafter DGEQ) which is expected to equalize non-uniformities of spectral intensity in WDM transportation. Batch-fabricated multi sliders for DGEQ are presented as optical application of electrostatic controlled linear inchworm actuator (hereafter ECLIA). 8 multi sliders (600 μm wide) corresponding to 8 channels are fabricated by DRIE and bonded on a pyrex glass substrate for a reliable electrical isolation. Operating of developed multi sliders and their optical attenuation as DGEQ will be reported in succession to design and fabrication of device. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
ECLIA / DGEQ / Arrayed sliders / Batch fabrication / Parallel motion / WDM / / |
Reference Info. |
IEICE Tech. Rep., vol. 106, no. 19, OPE2006-2, pp. 7-12, April 2006. |
Paper # |
OPE2006-2 |
Date of Issue |
2006-04-14 (R, CPM, OPE) |
ISSN |
Print edition: ISSN 0913-5685 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
Link to ES Tech. Rep. Archives: CPM2006-2 OPE2006-2 |
Conference Information |
Committee |
R CPM OPE |
Conference Date |
2006-04-21 - 2006-04-21 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kikai-Shinko-Kaikan Bldg. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Packaging and reliability of optical componetns, etc. |
Paper Information |
Registration To |
OPE |
Conference Code |
2006-04-R-CPM-OPE |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Mechanical Dynamic Gain Equalizer using MEMS Actuator Array |
Sub Title (in English) |
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Keyword(1) |
ECLIA |
Keyword(2) |
DGEQ |
Keyword(3) |
Arrayed sliders |
Keyword(4) |
Batch fabrication |
Keyword(5) |
Parallel motion |
Keyword(6) |
WDM |
Keyword(7) |
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Keyword(8) |
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1st Author's Name |
Ikuo Kumagaya |
1st Author's Affiliation |
Ritsumeikan University (Rits) |
2nd Author's Name |
Nobihito Kinoshita |
2nd Author's Affiliation |
Ritsumeikan University (Rits) |
3rd Author's Name |
Satoshi Konishi |
3rd Author's Affiliation |
Ritsumeikan University (Rits) |
4th Author's Name |
Tomomi Sano |
4th Author's Affiliation |
Sumitomo Electric Industries, Ltd. (SEI) |
5th Author's Name |
Makoto Katayama |
5th Author's Affiliation |
Sumitomo Electric Industries, Ltd. (SEI) |
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Speaker |
Author-1 |
Date Time |
2006-04-21 13:25:00 |
Presentation Time |
25 minutes |
Registration for |
OPE |
Paper # |
R2006-2, CPM2006-2, OPE2006-2 |
Volume (vol) |
vol.106 |
Number (no) |
no.17(R), no.18(CPM), no.19(OPE) |
Page |
pp.7-12 |
#Pages |
6 |
Date of Issue |
2006-04-14 (R, CPM, OPE) |
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