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| Presentation | 2006-06-21 13:50 Characterization of Interfacial Reactions in Al2O3/SiNx/poly-Si Stack Structure by Photoemission Measurements Hiroaki Furukawa, Masahiro Taira, Akio Ohta, Hiroshi Nakagawa, Hideki Murakami, Seiichi Miyazaki (Hiroshima Univ.), Kenji Komeda, Mitsuhiro Horikawa, Kuniaki Koyama, Hideharu Miyake (Elpida Memory) Link to ES Tech. Rep. Archives:  SDM2006-44 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 106, no. 108, SDM2006-44, pp. 13-17, June 2006. | |
| Paper # | SDM2006-44 | |
| Date of Issue | 2006-06-14 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | Link to ES Tech. Rep. Archives: SDM2006-44 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2006-06-21 - 2006-06-22 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Faculty Club, Hiroshima Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Science and Technologies of Dielectric Thin Films for Future Electron Devices |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2006-06-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characterization of Interfacial Reactions in Al2O3/SiNx/poly-Si Stack Structure by Photoemission Measurements |
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| 1st Author's Name | Hiroaki Furukawa |
| 1st Author's Affiliation | Hiroshima University (Hiroshima Univ.) |
| 2nd Author's Name | Masahiro Taira |
| 2nd Author's Affiliation | Hiroshima University (Hiroshima Univ.) |
| 3rd Author's Name | Akio Ohta |
| 3rd Author's Affiliation | Hiroshima University (Hiroshima Univ.) |
| 4th Author's Name | Hiroshi Nakagawa |
| 4th Author's Affiliation | Hiroshima University (Hiroshima Univ.) |
| 5th Author's Name | Hideki Murakami |
| 5th Author's Affiliation | Hiroshima University (Hiroshima Univ.) |
| 6th Author's Name | Seiichi Miyazaki |
| 6th Author's Affiliation | Hiroshima University (Hiroshima Univ.) |
| 7th Author's Name | Kenji Komeda |
| 7th Author's Affiliation | Elpida Memory, Inc (Elpida Memory) |
| 8th Author's Name | Mitsuhiro Horikawa |
| 8th Author's Affiliation | Elpida Memory, Inc (Elpida Memory) |
| 9th Author's Name | Kuniaki Koyama |
| 9th Author's Affiliation | Elpida Memory, Inc (Elpida Memory) |
| 10th Author's Name | Hideharu Miyake |
| 10th Author's Affiliation | Elpida Memory, Inc (Elpida Memory) |
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| Speaker | Author-1 |
| Date Time | 2006-06-21 13:50:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | SDM2006-44 |
| Volume (vol) | vol.106 |
| Number (no) | no.108 |
| Page | pp.13-17 |
| #Pages | 5 |
| Date of Issue | 2006-06-14 (SDM) |
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