Paper Abstract and Keywords |
Presentation |
2006-12-15 14:15
Approach to the ultimate quartz crystal units Takaya Watanabe (FT Design Lab.) Link to ES Tech. Rep. Archives: EMD2006-59 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Quartz crystal units are representatives of an electromechanical parts. It is a system with the potentiality of making of the device micro from about 10000 times the system that accumulates by the mechanical energy larger than the system that accumulates by electric energy. The size of the AT-cut quartz plate using the thickness twist mode is calculated from the Beckmann’s constant to about ten times the quartz plate thickness. A complete crystal of the homo-epitaxial growth quartz crystal thin film is formed on the quartz plate of an arbitrary cutting angle as a method of achieving the ultimate quartz crystal units. The electrode design where spurious is not generated is applied to this homo-epitaxial growth crystal thin film. The manufacturing process whole of an ultimate quartz crystal units is examined. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
quartz crystal units / thickness twist mode / Beckmann’s constant / homo-epitaxial growth quartz crystal thin film / high speed etching / / / |
Reference Info. |
IEICE Tech. Rep., vol. 106, no. 434, EMD2006-59, pp. 9-14, Dec. 2006. |
Paper # |
EMD2006-59 |
Date of Issue |
2006-12-08 (EMD) |
ISSN |
Print edition: ISSN 0913-5685 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
Link to ES Tech. Rep. Archives: EMD2006-59 |
Conference Information |
Committee |
EMD |
Conference Date |
2006-12-15 - 2006-12-15 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Kikai-Shinko-Kaikan Bldg |
Topics (in Japanese) |
(See Japanese page) |
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Paper Information |
Registration To |
EMD |
Conference Code |
2006-12-EMD |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Approach to the ultimate quartz crystal units |
Sub Title (in English) |
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Keyword(1) |
quartz crystal units |
Keyword(2) |
thickness twist mode |
Keyword(3) |
Beckmann’s constant |
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homo-epitaxial growth quartz crystal thin film |
Keyword(5) |
high speed etching |
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1st Author's Name |
Takaya Watanabe |
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FT Design Lab. (FT Design Lab.) |
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Speaker |
Author-1 |
Date Time |
2006-12-15 14:15:00 |
Presentation Time |
25 minutes |
Registration for |
EMD |
Paper # |
EMD2006-59 |
Volume (vol) |
vol.106 |
Number (no) |
no.434 |
Page |
pp.9-14 |
#Pages |
6 |
Date of Issue |
2006-12-08 (EMD) |