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| Presentation | 2007-12-13 13:00 A self-running noncontact linear stage using ultrasonic standing waves Daisuke Koyama, Hiroyuki Takei, Kentaro Nakamura, Sadayuki Ueha (Tokyo Tech.)  US2007-82 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | A standing wave type slider for a self-running ultrasonically levitated linear stage is discussed. The slider can be levitated and moved using the acoustic radiation force and the acoustic streaming. The slider has the simple configuration: it consists of an aluminum vibrating plate and a PZT element. The configuration of the slider was determined via the harmonic analysis results of the FEA (Finite Elemental Analysis) to obtain the large asymmetric vibration distribution for the high thrust and levitation performance. As a preliminary step, the computed result of the sound pressure distribution in the 1-mm air gap by the FEA was compared with the experimental results using the fiber optic probe. The direction of the total driving force for the acoustic streaming in the small air gap was estimated by the sound pressure distribution calculated by the FEA, and it was found that the direction of the acoustic streaming could be switched by controlling the vibration mode of the slider. The flexural standing wave could be generated along the vibrating plate near the predicted frequencies by the FEA results. The slider could be levitated by the acoustic radiation force radiated from own vibrating plate at several frequencies. The slider could be moved in the negative and positive direction at 68 and 69 kHz, which correspond to the computed results by FEA, with the asymmetric vibrating distribution of the slider’s vibrating plate. The larger thrust could be obtained with the smaller levitation distance, and the maximum thrust was 19 mN. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Self-running slider / Near-field acoustic levitation / Acoustic streaming / FEA / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 107, no. 376, US2007-82, pp. 1-6, Dec. 2007. | |
| Paper # | US2007-82 | |
| Date of Issue | 2007-12-06 (US) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2007-82 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2007-12-13 - 2007-12-13 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tokyo Inst. of Tech. (Suzukake-dai) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | High Power Ultrasonics |
| Paper Information | |
| Registration To | US |
| Conference Code | 2007-12-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A self-running noncontact linear stage using ultrasonic standing waves |
| Sub Title (in English) | |
| Keyword(1) | Self-running slider |
| Keyword(2) | Near-field acoustic levitation |
| Keyword(3) | Acoustic streaming |
| Keyword(4) | FEA |
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| Keyword(8) | |
| 1st Author's Name | Daisuke Koyama |
| 1st Author's Affiliation | Tokyo Institute of Technology (Tokyo Tech.) |
| 2nd Author's Name | Hiroyuki Takei |
| 2nd Author's Affiliation | Tokyo Institute of Technology (Tokyo Tech.) |
| 3rd Author's Name | Kentaro Nakamura |
| 3rd Author's Affiliation | Tokyo Institute of Technology (Tokyo Tech.) |
| 4th Author's Name | Sadayuki Ueha |
| 4th Author's Affiliation | Tokyo Institute of Technology (Tokyo Tech.) |
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| Speaker | Author-1 |
| Date Time | 2007-12-13 13:00:00 |
| Presentation Time | 30 minutes |
| Registration for | US |
| Paper # | US2007-82 |
| Volume (vol) | vol.107 |
| Number (no) | no.376 |
| Page | pp.1-6 |
| #Pages | 6 |
| Date of Issue | 2007-12-06 (US) |
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