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Paper Abstract and Keywords
Presentation 2007-12-14 11:00
Analysis of Capacitance-Voltage Characteristics of Poly-Si TFTs using Device Simulation
Tsuyoshi Kuzuoka, Hiroshi Tsuji, Masaharu Kirihara, Yoshinari Kamakura, Kenji Taniguchi (Osaka Univ.) SDM2007-225 Link to ES Tech. Rep. Archives: SDM2007-225
Abstract (in Japanese) (See Japanese page) 
(in English) Capacitance-voltage characteristics of short channel Poly-Si TFTs containing only a single grain boundary were investigated using a two-dimensional device simulator. It was demonstrated that the drain/source charge partition is significantly affected by the position of the grain boundary, which results in the asymmetric characteristics of the gate-to-source (Cgs) and the gate-to-drain (Cgd) capacitances even if no bias is applied between source and drain. We discuss the mechanisms of the asymmetric charge partition caused by the grain boundary by analyzing the internal physical quantities in TFTs (potential, carrier density distribution, etc.) using the device simulations.
Keyword (in Japanese) (See Japanese page) 
(in English) polysilicon / TFT / grain boundary / device simulation / / / /  
Reference Info. IEICE Tech. Rep., vol. 107, no. 388, SDM2007-225, pp. 15-18, Dec. 2007.
Paper # SDM2007-225 
Date of Issue 2007-12-07 (SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2007-225 Link to ES Tech. Rep. Archives: SDM2007-225

Conference Information
Committee SDM  
Conference Date 2007-12-14 - 2007-12-14 
Place (in Japanese) (See Japanese page) 
Place (in English) Nara Institute Science and Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Silicon related material, process and device 
Paper Information
Registration To SDM 
Conference Code 2007-12-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Analysis of Capacitance-Voltage Characteristics of Poly-Si TFTs using Device Simulation 
Sub Title (in English)  
Keyword(1) polysilicon  
Keyword(2) TFT  
Keyword(3) grain boundary  
Keyword(4) device simulation  
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1st Author's Name Tsuyoshi Kuzuoka  
1st Author's Affiliation Osaka University (Osaka Univ.)
2nd Author's Name Hiroshi Tsuji  
2nd Author's Affiliation Osaka University (Osaka Univ.)
3rd Author's Name Masaharu Kirihara  
3rd Author's Affiliation Osaka University (Osaka Univ.)
4th Author's Name Yoshinari Kamakura  
4th Author's Affiliation Osaka University (Osaka Univ.)
5th Author's Name Kenji Taniguchi  
5th Author's Affiliation Osaka University (Osaka Univ.)
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Speaker Author-1 
Date Time 2007-12-14 11:00:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2007-225 
Volume (vol) vol.107 
Number (no) no.388 
Page pp.15-18 
#Pages
Date of Issue 2007-12-07 (SDM) 


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