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Paper Abstract and Keywords
Presentation 2008-07-09 13:20
[Invited Talk] Guidelines for the Threshold Voltage Control of Metal/HfSiON system
Akira Nishiyama, Yoshinori Tsuchiya, Masahiko Yoshiki, Atsuhiro Kinoshita, Junji Koga, Masato Koyama (Toshiba) ED2008-43 SDM2008-62 Link to ES Tech. Rep. Archives: ED2008-43 SDM2008-62
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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Reference Info. IEICE Tech. Rep., vol. 108, no. 122, SDM2008-62, pp. 21-24, July 2008.
Paper # SDM2008-62 
Date of Issue 2008-07-02 (ED, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2008-43 SDM2008-62 Link to ES Tech. Rep. Archives: ED2008-43 SDM2008-62

Conference Information
Committee SDM ED  
Conference Date 2008-07-09 - 2008-07-11 
Place (in Japanese) (See Japanese page) 
Place (in English) Kaderu2・7 
Topics (in Japanese) (See Japanese page) 
Topics (in English) 2008 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices 
Paper Information
Registration To SDM 
Conference Code 2008-07-SDM-ED 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Guidelines for the Threshold Voltage Control of Metal/HfSiON system 
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1st Author's Name Akira Nishiyama  
1st Author's Affiliation Toshiba Corporation (Toshiba)
2nd Author's Name Yoshinori Tsuchiya  
2nd Author's Affiliation Toshiba Corporation (Toshiba)
3rd Author's Name Masahiko Yoshiki  
3rd Author's Affiliation Toshiba Corporation (Toshiba)
4th Author's Name Atsuhiro Kinoshita  
4th Author's Affiliation Toshiba Corporation (Toshiba)
5th Author's Name Junji Koga  
5th Author's Affiliation Toshiba Corporation (Toshiba)
6th Author's Name Masato Koyama  
6th Author's Affiliation Toshiba Corporation (Toshiba)
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Date Time 2008-07-09 13:20:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # ED2008-43, SDM2008-62 
Volume (vol) vol.108 
Number (no) no.121(ED), no.122(SDM) 
Page pp.21-24 
#Pages
Date of Issue 2008-07-02 (ED, SDM) 


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