Paper Abstract and Keywords |
Presentation |
2009-05-14 14:45
Property of Ga2O3 films and evaluation of oxygen sensors properties Shinya Kayano, Takashi Horiuchi, Masaaki Isai (Shizuoka Univ.) ED2009-21 CPM2009-11 SDM2009-11 Link to ES Tech. Rep. Archives: ED2009-21 CPM2009-11 SDM2009-11 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Recentry, from a point of environmental problems, oxygen gas sensors attract attention of controlling the exhaust gas. The Ga2O3 has an oxygen detection characteristic at more than 900℃, so this material the attracts much attention as an oxygen sensor at high temperature. Therefore β-Ga2O3 films have been prepared by a RF magnetron sputtering method. The influence of annealing process on the crystal properties was investigated. The effect of the measureing temperature on the crystal properties was also investigated. It was found that the crystal properties of films depend on the annealing temperature. The stable properties were obtained at about 1000℃. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Gallium oxide / Metal oxides / Magnetron sputtering method / Rapid thermal annealing(RTA) / Oxygen sensor / / / |
Reference Info. |
IEICE Tech. Rep., vol. 109, no. 24, CPM2009-11, pp. 17-20, May 2009. |
Paper # |
CPM2009-11 |
Date of Issue |
2009-05-07 (ED, CPM, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2009-21 CPM2009-11 SDM2009-11 Link to ES Tech. Rep. Archives: ED2009-21 CPM2009-11 SDM2009-11 |
Conference Information |
Committee |
ED CPM SDM |
Conference Date |
2009-05-14 - 2009-05-15 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Satellite Office, Toyohashi Univ. of Technology |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Crystal growth, evaluation and device (Compound, Si, SiGe, Electronic and light emitting materials) |
Paper Information |
Registration To |
CPM |
Conference Code |
2009-05-ED-CPM-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Property of Ga2O3 films and evaluation of oxygen sensors properties |
Sub Title (in English) |
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Keyword(1) |
Gallium oxide |
Keyword(2) |
Metal oxides |
Keyword(3) |
Magnetron sputtering method |
Keyword(4) |
Rapid thermal annealing(RTA) |
Keyword(5) |
Oxygen sensor |
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1st Author's Name |
Shinya Kayano |
1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
2nd Author's Name |
Takashi Horiuchi |
2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
3rd Author's Name |
Masaaki Isai |
3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
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Speaker |
Author-1 |
Date Time |
2009-05-14 14:45:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
ED2009-21, CPM2009-11, SDM2009-11 |
Volume (vol) |
vol.109 |
Number (no) |
no.23(ED), no.24(CPM), no.25(SDM) |
Page |
pp.17-20 |
#Pages |
4 |
Date of Issue |
2009-05-07 (ED, CPM, SDM) |
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