Paper Abstract and Keywords |
Presentation |
2009-08-10 16:30
Changes in Chemical Bonding States of Diamond-Like Carbon Films by Atomic Hydrogen Irradiation Ryoichi Osozawa, Hideki Nakazawa, Tomohide Okuzaki, Naoyuki Satoh, Yoshiharu Enta (Hirosaki Univ.), Maki Suemitsu (Tohoku Univ.) CPM2009-37 Link to ES Tech. Rep. Archives: CPM2009-37 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We have deposited diamond-like carbon (DLC) films on Si substrate by pulsed laser deposition using KrF excimer laser, and investigated the effects of atomic-hydrogen irradiation on the chemical bonding and electronic states and the structure of the films by photoelectron spectroscopy (PES) using synchrotron radiation and Raman spectroscopy. The fraction of sp$^3$ bonds at the film surface, as evaluated from C1s and valence-band PES spectra, increased at a substrate temperature of 400$^{\circ}$C with increasing atomic-hydrogen exposure time, whereas the sp$^3$ fraction decreased at 700$^{\circ}$C with the exposure time. The Raman spectrum for the film exposed to atomic hydrogen at 400$^{\circ}$C showed that the clustering of sp$^2$ carbon progressed in the film near the surface at the low temperature. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Diamond-like carbon / Photoelectron spectroscopy / Atomic hydrogen / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 109, no. 171, CPM2009-37, pp. 19-24, Aug. 2009. |
Paper # |
CPM2009-37 |
Date of Issue |
2009-08-03 (CPM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
CPM2009-37 Link to ES Tech. Rep. Archives: CPM2009-37 |
Conference Information |
Committee |
CPM |
Conference Date |
2009-08-10 - 2009-08-11 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Hirosaki Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Electronic Component Parts and Materials, etc. |
Paper Information |
Registration To |
CPM |
Conference Code |
2009-08-CPM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Changes in Chemical Bonding States of Diamond-Like Carbon Films by Atomic Hydrogen Irradiation |
Sub Title (in English) |
|
Keyword(1) |
Diamond-like carbon |
Keyword(2) |
Photoelectron spectroscopy |
Keyword(3) |
Atomic hydrogen |
Keyword(4) |
|
Keyword(5) |
|
Keyword(6) |
|
Keyword(7) |
|
Keyword(8) |
|
1st Author's Name |
Ryoichi Osozawa |
1st Author's Affiliation |
Hirosaki University (Hirosaki Univ.) |
2nd Author's Name |
Hideki Nakazawa |
2nd Author's Affiliation |
Hirosaki University (Hirosaki Univ.) |
3rd Author's Name |
Tomohide Okuzaki |
3rd Author's Affiliation |
Hirosaki University (Hirosaki Univ.) |
4th Author's Name |
Naoyuki Satoh |
4th Author's Affiliation |
Hirosaki University (Hirosaki Univ.) |
5th Author's Name |
Yoshiharu Enta |
5th Author's Affiliation |
Hirosaki University (Hirosaki Univ.) |
6th Author's Name |
Maki Suemitsu |
6th Author's Affiliation |
Tohoku University (Tohoku Univ.) |
7th Author's Name |
|
7th Author's Affiliation |
() |
8th Author's Name |
|
8th Author's Affiliation |
() |
9th Author's Name |
|
9th Author's Affiliation |
() |
10th Author's Name |
|
10th Author's Affiliation |
() |
11th Author's Name |
|
11th Author's Affiliation |
() |
12th Author's Name |
|
12th Author's Affiliation |
() |
13th Author's Name |
|
13th Author's Affiliation |
() |
14th Author's Name |
|
14th Author's Affiliation |
() |
15th Author's Name |
|
15th Author's Affiliation |
() |
16th Author's Name |
|
16th Author's Affiliation |
() |
17th Author's Name |
|
17th Author's Affiliation |
() |
18th Author's Name |
|
18th Author's Affiliation |
() |
19th Author's Name |
|
19th Author's Affiliation |
() |
20th Author's Name |
|
20th Author's Affiliation |
() |
Speaker |
Author-1 |
Date Time |
2009-08-10 16:30:00 |
Presentation Time |
25 minutes |
Registration for |
CPM |
Paper # |
CPM2009-37 |
Volume (vol) |
vol.109 |
Number (no) |
no.171 |
Page |
pp.19-24 |
#Pages |
6 |
Date of Issue |
2009-08-03 (CPM) |
|