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Paper Abstract and Keywords
Presentation 2009-08-10 16:30
Changes in Chemical Bonding States of Diamond-Like Carbon Films by Atomic Hydrogen Irradiation
Ryoichi Osozawa, Hideki Nakazawa, Tomohide Okuzaki, Naoyuki Satoh, Yoshiharu Enta (Hirosaki Univ.), Maki Suemitsu (Tohoku Univ.) CPM2009-37 Link to ES Tech. Rep. Archives: CPM2009-37
Abstract (in Japanese) (See Japanese page) 
(in English) We have deposited diamond-like carbon (DLC) films on Si substrate by pulsed laser deposition using KrF excimer laser, and investigated the effects of atomic-hydrogen irradiation on the chemical bonding and electronic states and the structure of the films by photoelectron spectroscopy (PES) using synchrotron radiation and Raman spectroscopy. The fraction of sp$^3$ bonds at the film surface, as evaluated from C1s and valence-band PES spectra, increased at a substrate temperature of 400$^{\circ}$C with increasing atomic-hydrogen exposure time, whereas the sp$^3$ fraction decreased at 700$^{\circ}$C with the exposure time. The Raman spectrum for the film exposed to atomic hydrogen at 400$^{\circ}$C showed that the clustering of sp$^2$ carbon progressed in the film near the surface at the low temperature.
Keyword (in Japanese) (See Japanese page) 
(in English) Diamond-like carbon / Photoelectron spectroscopy / Atomic hydrogen / / / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 171, CPM2009-37, pp. 19-24, Aug. 2009.
Paper # CPM2009-37 
Date of Issue 2009-08-03 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF CPM2009-37 Link to ES Tech. Rep. Archives: CPM2009-37

Conference Information
Committee CPM  
Conference Date 2009-08-10 - 2009-08-11 
Place (in Japanese) (See Japanese page) 
Place (in English) Hirosaki Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Electronic Component Parts and Materials, etc. 
Paper Information
Registration To CPM 
Conference Code 2009-08-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Changes in Chemical Bonding States of Diamond-Like Carbon Films by Atomic Hydrogen Irradiation 
Sub Title (in English)  
Keyword(1) Diamond-like carbon  
Keyword(2) Photoelectron spectroscopy  
Keyword(3) Atomic hydrogen  
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1st Author's Name Ryoichi Osozawa  
1st Author's Affiliation Hirosaki University (Hirosaki Univ.)
2nd Author's Name Hideki Nakazawa  
2nd Author's Affiliation Hirosaki University (Hirosaki Univ.)
3rd Author's Name Tomohide Okuzaki  
3rd Author's Affiliation Hirosaki University (Hirosaki Univ.)
4th Author's Name Naoyuki Satoh  
4th Author's Affiliation Hirosaki University (Hirosaki Univ.)
5th Author's Name Yoshiharu Enta  
5th Author's Affiliation Hirosaki University (Hirosaki Univ.)
6th Author's Name Maki Suemitsu  
6th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker Author-1 
Date Time 2009-08-10 16:30:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2009-37 
Volume (vol) vol.109 
Number (no) no.171 
Page pp.19-24 
#Pages
Date of Issue 2009-08-03 (CPM) 


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