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| Presentation | 2009-10-01 15:20 [Invited Talk] Integrated MEMS and Biomedical MEMS Masayoshi Esashi (Tohoku Univ.)  ICD2009-44 Link to ES Tech. Rep. Archives: ICD2009-44 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Integrated MEMS have been effectively applied for capacitive sensors by integrating capacitance detection circuits and for arrayed MEMS to reduce the lead wires. Integrated MEMS are expected for RF to reduce stray inductance. Mechanical sensors for pressure, acceleration and force, biomedical devices as active catheter and ultrasound transducers and wireless chips which have multiple band MEMS filters are described as examples of the integrated MEMS. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Integrated MEMS / Biomedical MEMS / Integrated Capacitive Pressure Sensor / Multi-band Wireless Chip / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 109, no. 214, ICD2009-44, pp. 57-62, Oct. 2009. | |
| Paper # | ICD2009-44 | |
| Date of Issue | 2009-09-24 (ICD) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ICD2009-44 Link to ES Tech. Rep. Archives: ICD2009-44 |
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| Conference Information | |
| Committee | ICD ITE-IST |
| Conference Date | 2009-10-01 - 2009-10-02 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | CIC Tokyo (Tamachi) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Analog, Mixed analog and digital, RF, and sensor interface circuitry |
| Paper Information | |
| Registration To | ICD |
| Conference Code | 2009-10-ICD-IST |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Integrated MEMS and Biomedical MEMS |
| Sub Title (in English) | |
| Keyword(1) | Integrated MEMS |
| Keyword(2) | Biomedical MEMS |
| Keyword(3) | Integrated Capacitive Pressure Sensor |
| Keyword(4) | Multi-band Wireless Chip |
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| 1st Author's Name | Masayoshi Esashi |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
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| Speaker | Author-1 |
| Date Time | 2009-10-01 15:20:00 |
| Presentation Time | 50 minutes |
| Registration for | ICD |
| Paper # | ICD2009-44 |
| Volume (vol) | vol.109 |
| Number (no) | no.214 |
| Page | pp.57-62 |
| #Pages | 6 |
| Date of Issue | 2009-09-24 (ICD) |
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