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Paper Abstract and Keywords
Presentation 2009-10-23 10:15
Vertical Directional Coupler Made of Amorphous Silicon Waveguides
Youichi Sakakibara, Toshihiro Kamei, Emiko Itoga, Makoto Okano, Kenji Kintaka, Yuya Shoji, Masahiko Mori (AIST) OCS2009-66 OPE2009-132 LQE2009-91 Link to ES Tech. Rep. Archives: OPE2009-132 LQE2009-91
Abstract (in Japanese) (See Japanese page) 
(in English) With repeated depositions of amorphous silicon thin layers three-dimensional optical wiring is possible in principle. In this work we investigated the optical properties of the hydrogenated amorphous thin film at the optical telecommunication wavelengths from optical absorption and refractive index. We also investigated the fabrication ability of wire waveguides made of the amorphous silicon with an i-line stepper and a vertical directional coupler.
Keyword (in Japanese) (See Japanese page) 
(in English) Amorphous Silicon / Waveguide / Vertical Directional Coupler / / / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 244, OPE2009-132, pp. 125-129, Oct. 2009.
Paper # OPE2009-132 
Date of Issue 2009-10-15 (OCS, OPE, LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF OCS2009-66 OPE2009-132 LQE2009-91 Link to ES Tech. Rep. Archives: OPE2009-132 LQE2009-91

Conference Information
Committee OPE LQE OCS  
Conference Date 2009-10-22 - 2009-10-23 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
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Paper Information
Registration To OPE 
Conference Code 2009-10-OPE-LQE-OCS 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Vertical Directional Coupler Made of Amorphous Silicon Waveguides 
Sub Title (in English)  
Keyword(1) Amorphous Silicon  
Keyword(2) Waveguide  
Keyword(3) Vertical Directional Coupler  
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1st Author's Name Youichi Sakakibara  
1st Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
2nd Author's Name Toshihiro Kamei  
2nd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
3rd Author's Name Emiko Itoga  
3rd Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
4th Author's Name Makoto Okano  
4th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
5th Author's Name Kenji Kintaka  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
6th Author's Name Yuya Shoji  
6th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
7th Author's Name Masahiko Mori  
7th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
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Speaker Author-1 
Date Time 2009-10-23 10:15:00 
Presentation Time 25 minutes 
Registration for OPE 
Paper # OCS2009-66, OPE2009-132, LQE2009-91 
Volume (vol) vol.109 
Number (no) no.243(OCS), no.244(OPE), no.245(LQE) 
Page pp.125-129 
#Pages
Date of Issue 2009-10-15 (OCS, OPE, LQE) 


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