Paper Abstract and Keywords |
Presentation |
2009-10-23 10:15
Vertical Directional Coupler Made of Amorphous Silicon Waveguides Youichi Sakakibara, Toshihiro Kamei, Emiko Itoga, Makoto Okano, Kenji Kintaka, Yuya Shoji, Masahiko Mori (AIST) OCS2009-66 OPE2009-132 LQE2009-91 Link to ES Tech. Rep. Archives: OPE2009-132 LQE2009-91 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
With repeated depositions of amorphous silicon thin layers three-dimensional optical wiring is possible in principle. In this work we investigated the optical properties of the hydrogenated amorphous thin film at the optical telecommunication wavelengths from optical absorption and refractive index. We also investigated the fabrication ability of wire waveguides made of the amorphous silicon with an i-line stepper and a vertical directional coupler. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Amorphous Silicon / Waveguide / Vertical Directional Coupler / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 109, no. 244, OPE2009-132, pp. 125-129, Oct. 2009. |
Paper # |
OPE2009-132 |
Date of Issue |
2009-10-15 (OCS, OPE, LQE) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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Download PDF |
OCS2009-66 OPE2009-132 LQE2009-91 Link to ES Tech. Rep. Archives: OPE2009-132 LQE2009-91 |
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