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Paper Abstract and Keywords
Presentation 2009-11-19 09:50
MOVPE growth and optical properties of AlGaN on AlN/sapphire
Yuki Shimahara, Hiroyuki Taketomi, Hideto Miyake, Kazumasa Hiramatsu (Mie Univ.), Fumitsugu Fukuyo, Tomoyuki Okada, Hidetsugu Takaoka, Harumasa Yoshida (HAMAMATSU PHOTONICS K.K.) ED2009-130 CPM2009-104 LQE2009-109 Link to ES Tech. Rep. Archives: ED2009-130 CPM2009-104 LQE2009-109
Abstract (in Japanese) (See Japanese page) 
(in English) We performed growth of AlGaN on AlN/sapphire substrate as an underlying layer by low-pressure MOVPE with in-situ monitoring system, in order to fabricate a further high-quality and well-thickness controlled film, and controlled the film thickness. The Al content in AlGaN can be controlled by the growth temperature. Ultraviolet light of luminescence with wavelength that corresponded by changing the Al content was observed. Moreover, we fabricate the prototype ultraviolet-light source tube with the AlGaN film as a target for the electronic beam excitation. Luminous intensity was significantly improved by Si-doping, and optimization of the growth condition, and 247 nm deep-ultraviolet light was observed from the tube.
Keyword (in Japanese) (See Japanese page) 
(in English) LP-MOVPE / AlGaN / AlN / ultraviolet-light source / / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 288, ED2009-130, pp. 9-12, Nov. 2009.
Paper # ED2009-130 
Date of Issue 2009-11-12 (ED, CPM, LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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Download PDF ED2009-130 CPM2009-104 LQE2009-109 Link to ES Tech. Rep. Archives: ED2009-130 CPM2009-104 LQE2009-109

Conference Information
Committee ED LQE CPM  
Conference Date 2009-11-19 - 2009-11-20 
Place (in Japanese) (See Japanese page) 
Place (in English) Univ. of Tokushima (Josanjima Campus, Kogyo-Kaikan) 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ED 
Conference Code 2009-11-ED-LQE-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) MOVPE growth and optical properties of AlGaN on AlN/sapphire 
Sub Title (in English)  
Keyword(1) LP-MOVPE  
Keyword(2) AlGaN  
Keyword(3) AlN  
Keyword(4) ultraviolet-light source  
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1st Author's Name Yuki Shimahara  
1st Author's Affiliation Mie University (Mie Univ.)
2nd Author's Name Hiroyuki Taketomi  
2nd Author's Affiliation Mie University (Mie Univ.)
3rd Author's Name Hideto Miyake  
3rd Author's Affiliation Mie University (Mie Univ.)
4th Author's Name Kazumasa Hiramatsu  
4th Author's Affiliation Mie University (Mie Univ.)
5th Author's Name Fumitsugu Fukuyo  
5th Author's Affiliation HAMAMATSU PHOTONICS K.K. (HAMAMATSU PHOTONICS K.K.)
6th Author's Name Tomoyuki Okada  
6th Author's Affiliation HAMAMATSU PHOTONICS K.K. (HAMAMATSU PHOTONICS K.K.)
7th Author's Name Hidetsugu Takaoka  
7th Author's Affiliation HAMAMATSU PHOTONICS K.K. (HAMAMATSU PHOTONICS K.K.)
8th Author's Name Harumasa Yoshida  
8th Author's Affiliation HAMAMATSU PHOTONICS K.K. (HAMAMATSU PHOTONICS K.K.)
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Speaker Author-1 
Date Time 2009-11-19 09:50:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2009-130, CPM2009-104, LQE2009-109 
Volume (vol) vol.109 
Number (no) no.288(ED), no.289(CPM), no.290(LQE) 
Page pp.9-12 
#Pages
Date of Issue 2009-11-12 (ED, CPM, LQE) 


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