Paper Abstract and Keywords |
Presentation |
2009-12-18 14:30
Tribological Characteristics of ECR-Sputtered Fluorocarbon Thin Films Manabu Suzuki, Tomoyuki Kamata, Yusuke Tomine, Shun Hiruma, Shigeru Umemura (Chiba Inst. of Tech.), Shigeru Hirono (MES AFTY), Hidekazu Tohara, Hujio Okino, Yoshiyuki Hattori (Shinshu Univ.), Osamu Niwa (AIST), Diao Dongfeng (Xi'an Jiaotong Univ.) EMD2009-109 Link to ES Tech. Rep. Archives: EMD2009-109 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Fluorine-containing carbon thin films with low resistivity and high wear durability were synthesized by electron-cyclotron-resonance (ECR) plasma sputtering with mixed sputtering gas of argon and tetrafluoromethane (CF4).. We evaluated the surface roughness and the friction characteristics of the ECR-sputtered fluorocarbon thin films by atomic force microscopy and ball-on-disk-type friction tester, respectively. The surface roughness of the ECR-sputtered fluorocarbon films is almost same as that of the nondoped ECR-sputtered carbon films. The friction coefficient of the ECR-sputtered fluorocarbon films increased with the increase of the fluorine concentration of the films. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Fluorine / ECR sputter / Carbon / Thin film / Friction / / / |
Reference Info. |
IEICE Tech. Rep., vol. 109, no. 352, EMD2009-109, pp. 17-20, Dec. 2009. |
Paper # |
EMD2009-109 |
Date of Issue |
2009-12-11 (EMD) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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EMD2009-109 Link to ES Tech. Rep. Archives: EMD2009-109 |