IEICE Technical Committee Submission System
Conference Paper's Information
Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2009-12-18 14:30
Tribological Characteristics of ECR-Sputtered Fluorocarbon Thin Films
Manabu Suzuki, Tomoyuki Kamata, Yusuke Tomine, Shun Hiruma, Shigeru Umemura (Chiba Inst. of Tech.), Shigeru Hirono (MES AFTY), Hidekazu Tohara, Hujio Okino, Yoshiyuki Hattori (Shinshu Univ.), Osamu Niwa (AIST), Diao Dongfeng (Xi'an Jiaotong Univ.) EMD2009-109 Link to ES Tech. Rep. Archives: EMD2009-109
Abstract (in Japanese) (See Japanese page) 
(in English) Fluorine-containing carbon thin films with low resistivity and high wear durability were synthesized by electron-cyclotron-resonance (ECR) plasma sputtering with mixed sputtering gas of argon and tetrafluoromethane (CF4).. We evaluated the surface roughness and the friction characteristics of the ECR-sputtered fluorocarbon thin films by atomic force microscopy and ball-on-disk-type friction tester, respectively. The surface roughness of the ECR-sputtered fluorocarbon films is almost same as that of the nondoped ECR-sputtered carbon films. The friction coefficient of the ECR-sputtered fluorocarbon films increased with the increase of the fluorine concentration of the films.
Keyword (in Japanese) (See Japanese page) 
(in English) Fluorine / ECR sputter / Carbon / Thin film / Friction / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 352, EMD2009-109, pp. 17-20, Dec. 2009.
Paper # EMD2009-109 
Date of Issue 2009-12-11 (EMD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EMD2009-109 Link to ES Tech. Rep. Archives: EMD2009-109

Conference Information
Committee EMD  
Conference Date 2009-12-18 - 2009-12-18 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To EMD 
Conference Code 2009-12-EMD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Tribological Characteristics of ECR-Sputtered Fluorocarbon Thin Films 
Sub Title (in English)  
Keyword(1) Fluorine  
Keyword(2) ECR sputter  
Keyword(3) Carbon  
Keyword(4) Thin film  
Keyword(5) Friction  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Manabu Suzuki  
1st Author's Affiliation Chiba Institute of Technology (Chiba Inst. of Tech.)
2nd Author's Name Tomoyuki Kamata  
2nd Author's Affiliation Chiba Institute of Technology (Chiba Inst. of Tech.)
3rd Author's Name Yusuke Tomine  
3rd Author's Affiliation Chiba Institute of Technology (Chiba Inst. of Tech.)
4th Author's Name Shun Hiruma  
4th Author's Affiliation Chiba Institute of Technology (Chiba Inst. of Tech.)
5th Author's Name Shigeru Umemura  
5th Author's Affiliation Chiba Institute of Technology (Chiba Inst. of Tech.)
6th Author's Name Shigeru Hirono  
6th Author's Affiliation MES AFTY Corporation (MES AFTY)
7th Author's Name Hidekazu Tohara  
7th Author's Affiliation Shinshu University (Shinshu Univ.)
8th Author's Name Hujio Okino  
8th Author's Affiliation Shinshu University (Shinshu Univ.)
9th Author's Name Yoshiyuki Hattori  
9th Author's Affiliation Shinshu University (Shinshu Univ.)
10th Author's Name Osamu Niwa  
10th Author's Affiliation National Institute of Advanced Industrial Science and Technology (AIST)
11th Author's Name Diao Dongfeng  
11th Author's Affiliation Xi'an Jiaotong University (Xi'an Jiaotong Univ.)
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
Speaker Author-1 
Date Time 2009-12-18 14:30:00 
Presentation Time 25 minutes 
Registration for EMD 
Paper # EMD2009-109 
Volume (vol) vol.109 
Number (no) no.352 
Page pp.17-20 
#Pages
Date of Issue 2009-12-11 (EMD) 


[Return to Top Page]

[Return to IEICE Web Page]


The Institute of Electronics, Information and Communication Engineers (IEICE), Japan