Paper Abstract and Keywords |
Presentation |
2010-02-22 14:50
MOVPE Growth of InGaN/GaN MQW on a Polar, Semi-polar, and Non-polar GaN Stripes by Selective MOVPE Tomoyuki Tanikawa, Yoshio Honda, Masahito Yamaguchi (Nagoya Univ.) ED2009-200 SDM2009-197 Link to ES Tech. Rep. Archives: ED2009-200 SDM2009-197 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We investigated the InGaN/GaN multiple quantum well (MQW) thickness and luminescence distribution on non c-plane GaN stripes. In the case of non-polar crystal, InGaN MQW at the edge region was thicker than the center region. On the other hand, we got uniform thickness on semi-polar crystals. We simulated the diffusion process in gas phase and estimated the diffusion length of chemical species on each facets. The estimated results suggested that the non-uniformity of thickness was attributed to the chemical source diffusion from vapor phase. While CL spectra showed broad InGaN peak, there were no difference between the center and edge region. We concluded that non-uniformity of thickness and/or composition might be caused from the vapor diffusion in the selective growth on three dimensional structure. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
InGaN / semi-polar / non-polar / selective growth / MOVPE / / / |
Reference Info. |
IEICE Tech. Rep., vol. 109, no. 422, ED2009-200, pp. 23-28, Feb. 2010. |
Paper # |
ED2009-200 |
Date of Issue |
2010-02-15 (ED, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2009-200 SDM2009-197 Link to ES Tech. Rep. Archives: ED2009-200 SDM2009-197 |
Conference Information |
Committee |
ED SDM |
Conference Date |
2010-02-22 - 2010-02-23 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Okinawaken-Seinen-Kaikan |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Functional Nano Device and Related Technology |
Paper Information |
Registration To |
ED |
Conference Code |
2010-02-ED-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
MOVPE Growth of InGaN/GaN MQW on a Polar, Semi-polar, and Non-polar GaN Stripes by Selective MOVPE |
Sub Title (in English) |
|
Keyword(1) |
InGaN |
Keyword(2) |
semi-polar |
Keyword(3) |
non-polar |
Keyword(4) |
selective growth |
Keyword(5) |
MOVPE |
Keyword(6) |
|
Keyword(7) |
|
Keyword(8) |
|
1st Author's Name |
Tomoyuki Tanikawa |
1st Author's Affiliation |
Nagoya University (Nagoya Univ.) |
2nd Author's Name |
Yoshio Honda |
2nd Author's Affiliation |
Nagoya University (Nagoya Univ.) |
3rd Author's Name |
Masahito Yamaguchi |
3rd Author's Affiliation |
Nagoya University (Nagoya Univ.) |
4th Author's Name |
|
4th Author's Affiliation |
() |
5th Author's Name |
|
5th Author's Affiliation |
() |
6th Author's Name |
|
6th Author's Affiliation |
() |
7th Author's Name |
|
7th Author's Affiliation |
() |
8th Author's Name |
|
8th Author's Affiliation |
() |
9th Author's Name |
|
9th Author's Affiliation |
() |
10th Author's Name |
|
10th Author's Affiliation |
() |
11th Author's Name |
|
11th Author's Affiliation |
() |
12th Author's Name |
|
12th Author's Affiliation |
() |
13th Author's Name |
|
13th Author's Affiliation |
() |
14th Author's Name |
|
14th Author's Affiliation |
() |
15th Author's Name |
|
15th Author's Affiliation |
() |
16th Author's Name |
|
16th Author's Affiliation |
() |
17th Author's Name |
|
17th Author's Affiliation |
() |
18th Author's Name |
|
18th Author's Affiliation |
() |
19th Author's Name |
|
19th Author's Affiliation |
() |
20th Author's Name |
|
20th Author's Affiliation |
() |
Speaker |
Author-1 |
Date Time |
2010-02-22 14:50:00 |
Presentation Time |
25 minutes |
Registration for |
ED |
Paper # |
ED2009-200, SDM2009-197 |
Volume (vol) |
vol.109 |
Number (no) |
no.422(ED), no.423(SDM) |
Page |
pp.23-28 |
#Pages |
6 |
Date of Issue |
2010-02-15 (ED, SDM) |
|