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Paper Abstract and Keywords
Presentation 2010-02-22 15:40
Integration of Single-Electron Transistors Using Field-Emission-Induced Electromigration
Shunsuke Ueno, Yusuke Tomoda, Watari Kume, Michinobu Hanada, Kazutoshi Takiya, Jun-ichi Shirakashi (Tokyo Univ. of Agr. & Tech.) ED2009-202 SDM2009-199 Link to ES Tech. Rep. Archives: ED2009-202 SDM2009-199
Abstract (in Japanese) (See Japanese page) 
(in English) We report a novel technique for the integration of planer-type single-electron transistors (SETs) based on nanogaps using electromigration scheme, which is caused by field emission current. We call this method “activation”. Using the activation method, the electrical properties of the nanogaps can be controlled by only adjusting the magnitude of the applied current during the activation process. Furthermore, we are easily able to obtain the SETs. The integration was achieved by passing a large electrical current through two initial Ni nanogap electrodes connected in series. The initial Ni nanogap electrodes with the separation of a few tens of nanometers were fabricated by conventional electron-beam lithography and lift-off process. The tunnel resistances of two nanogaps, which were both simultaneously activated, were decreased from the order of 100 TΩ to 1 MΩ with increasing the preset current Is from 1 nA to 30 µA. SETs were both simultaneously formed using the activation, and current-voltage (I-V) characteristics exhibited clear suppression of conductance near zero bias voltage known as the Coulomb Blockade. Coulomb blockade voltage of each device was also obviously modulated by the gate voltage. The charging energy of both SETs decreased simultaneously with increasing the preset current. This tendency was quite similar to those of individually activated SETs. These results clearly indicate that the activation procedure allows us to easily and simply integrate planar-type Ni-based SETs.
Keyword (in Japanese) (See Japanese page) 
(in English) electromigration / field emission current / nanogap / single-electron transistor / integration / / /  
Reference Info. IEICE Tech. Rep., vol. 109, no. 422, ED2009-202, pp. 35-39, Feb. 2010.
Paper # ED2009-202 
Date of Issue 2010-02-15 (ED, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2009-202 SDM2009-199 Link to ES Tech. Rep. Archives: ED2009-202 SDM2009-199

Conference Information
Committee ED SDM  
Conference Date 2010-02-22 - 2010-02-23 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawaken-Seinen-Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Functional Nano Device and Related Technology 
Paper Information
Registration To ED 
Conference Code 2010-02-ED-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Integration of Single-Electron Transistors Using Field-Emission-Induced Electromigration 
Sub Title (in English)  
Keyword(1) electromigration  
Keyword(2) field emission current  
Keyword(3) nanogap  
Keyword(4) single-electron transistor  
Keyword(5) integration  
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Keyword(8)  
1st Author's Name Shunsuke Ueno  
1st Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. of Agr. & Tech.)
2nd Author's Name Yusuke Tomoda  
2nd Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. of Agr. & Tech.)
3rd Author's Name Watari Kume  
3rd Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. of Agr. & Tech.)
4th Author's Name Michinobu Hanada  
4th Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. of Agr. & Tech.)
5th Author's Name Kazutoshi Takiya  
5th Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. of Agr. & Tech.)
6th Author's Name Jun-ichi Shirakashi  
6th Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. of Agr. & Tech.)
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Speaker Author-1 
Date Time 2010-02-22 15:40:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2009-202, SDM2009-199 
Volume (vol) vol.109 
Number (no) no.422(ED), no.423(SDM) 
Page pp.35-39 
#Pages
Date of Issue 2010-02-15 (ED, SDM) 


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