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| Presentation | 2011-02-07 14:55 Stress Mapping in Thinned Si Wafer with Cu-TSV and Cu-Sn Microbumps Murugesan Mariappan, Takafumi Fukushima, Tetsu Tanaka, Mitsumasa Koyanagi (Tohoku Univ.)  SDM2010-223 Link to ES Tech. Rep. Archives: SDM2010-223 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 408, SDM2010-223, pp. 43-47, Feb. 2011. | |
| Paper # | SDM2010-223 | |
| Date of Issue | 2011-01-31 (SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2010-223 Link to ES Tech. Rep. Archives: SDM2010-223 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2011-02-07 - 2011-02-07 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | SDM |
| Conference Code | 2011-02-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Stress Mapping in Thinned Si Wafer with Cu-TSV and Cu-Sn Microbumps |
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| 1st Author's Name | Murugesan Mariappan |
| 1st Author's Affiliation | New Industry Creation Hatchery Center (NICHe), Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Takafumi Fukushima |
| 2nd Author's Affiliation | New Industry Creation Hatchery Center (NICHe), Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Tetsu Tanaka |
| 3rd Author's Affiliation | Dept. of Biomedical Engineering, Tohoku Univ. (Tohoku Univ.) |
| 4th Author's Name | Mitsumasa Koyanagi |
| 4th Author's Affiliation | New Industry Creation Hatchery Center (NICHe), Tohoku University (Tohoku Univ.) |
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| Speaker | Author-1 |
| Date Time | 2011-02-07 14:55:00 |
| Presentation Time | 30 minutes |
| Registration for | SDM |
| Paper # | SDM2010-223 |
| Volume (vol) | vol.110 |
| Number (no) | no.408 |
| Page | pp.43-47 |
| #Pages | 5 |
| Date of Issue | 2011-01-31 (SDM) |
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