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| Presentation | 2011-02-23 15:40 Development of Miniaturized Electron Optical Column in micro scale and its Application to Mask-less Lithography Yoichiro Neo, Yasuo Takagi, Takahiro Fujino, Akifumi Koike (Shizuoka Univ. RIE), Masayoshi Nagao, Tomoya Yoshida, Takashi Nishi (ASIT), Hidekazu Murata, Kentaro Sakai (Meijo Univ.), Toru Aoki, Hidenori Mimura (Shizuoka Univ. RIE)  ED2010-196 SDM2010-231 Link to ES Tech. Rep. Archives: ED2010-196 SDM2010-231 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 110, no. 423, ED2010-196, pp. 25-29, Feb. 2011. | |
| Paper # | ED2010-196 | |
| Date of Issue | 2011-02-16 (ED, SDM) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2010-196 SDM2010-231 Link to ES Tech. Rep. Archives: ED2010-196 SDM2010-231 |
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| Conference Information | |
| Committee | SDM ED |
| Conference Date | 2011-02-23 - 2011-02-24 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Hokkaido Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Functional nanodevices and related technologies |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2011-02-SDM-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Miniaturized Electron Optical Column in micro scale and its Application to Mask-less Lithography |
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| 1st Author's Name | Yoichiro Neo |
| 1st Author's Affiliation | Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE) |
| 2nd Author's Name | Yasuo Takagi |
| 2nd Author's Affiliation | Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE) |
| 3rd Author's Name | Takahiro Fujino |
| 3rd Author's Affiliation | Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE) |
| 4th Author's Name | Akifumi Koike |
| 4th Author's Affiliation | Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE) |
| 5th Author's Name | Masayoshi Nagao |
| 5th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (ASIT) |
| 6th Author's Name | Tomoya Yoshida |
| 6th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (ASIT) |
| 7th Author's Name | Takashi Nishi |
| 7th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (ASIT) |
| 8th Author's Name | Hidekazu Murata |
| 8th Author's Affiliation | Meijo University (Meijo Univ.) |
| 9th Author's Name | Kentaro Sakai |
| 9th Author's Affiliation | Meijo University (Meijo Univ.) |
| 10th Author's Name | Toru Aoki |
| 10th Author's Affiliation | Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE) |
| 11th Author's Name | Hidenori Mimura |
| 11th Author's Affiliation | Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE) |
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| Speaker | Author-1 |
| Date Time | 2011-02-23 15:40:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2010-196, SDM2010-231 |
| Volume (vol) | vol.110 |
| Number (no) | no.423(ED), no.424(SDM) |
| Page | pp.25-29 |
| #Pages | 5 |
| Date of Issue | 2011-02-16 (ED, SDM) |
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