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Paper Abstract and Keywords
Presentation 2011-02-23 15:40
Development of Miniaturized Electron Optical Column in micro scale and its Application to Mask-less Lithography
Yoichiro Neo, Yasuo Takagi, Takahiro Fujino, Akifumi Koike (Shizuoka Univ. RIE), Masayoshi Nagao, Tomoya Yoshida, Takashi Nishi (ASIT), Hidekazu Murata, Kentaro Sakai (Meijo Univ.), Toru Aoki, Hidenori Mimura (Shizuoka Univ. RIE) ED2010-196 SDM2010-231 Link to ES Tech. Rep. Archives: ED2010-196 SDM2010-231
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
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Reference Info. IEICE Tech. Rep., vol. 110, no. 423, ED2010-196, pp. 25-29, Feb. 2011.
Paper # ED2010-196 
Date of Issue 2011-02-16 (ED, SDM) 
ISSN Print edition: ISSN 0913-5685  Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2010-196 SDM2010-231 Link to ES Tech. Rep. Archives: ED2010-196 SDM2010-231

Conference Information
Committee SDM ED  
Conference Date 2011-02-23 - 2011-02-24 
Place (in Japanese) (See Japanese page) 
Place (in English) Hokkaido Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Functional nanodevices and related technologies 
Paper Information
Registration To ED 
Conference Code 2011-02-SDM-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of Miniaturized Electron Optical Column in micro scale and its Application to Mask-less Lithography 
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1st Author's Name Yoichiro Neo  
1st Author's Affiliation Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE)
2nd Author's Name Yasuo Takagi  
2nd Author's Affiliation Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE)
3rd Author's Name Takahiro Fujino  
3rd Author's Affiliation Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE)
4th Author's Name Akifumi Koike  
4th Author's Affiliation Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE)
5th Author's Name Masayoshi Nagao  
5th Author's Affiliation National Institute of Advanced Industrial Science and Technology (ASIT)
6th Author's Name Tomoya Yoshida  
6th Author's Affiliation National Institute of Advanced Industrial Science and Technology (ASIT)
7th Author's Name Takashi Nishi  
7th Author's Affiliation National Institute of Advanced Industrial Science and Technology (ASIT)
8th Author's Name Hidekazu Murata  
8th Author's Affiliation Meijo University (Meijo Univ.)
9th Author's Name Kentaro Sakai  
9th Author's Affiliation Meijo University (Meijo Univ.)
10th Author's Name Toru Aoki  
10th Author's Affiliation Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE)
11th Author's Name Hidenori Mimura  
11th Author's Affiliation Shizuoka University Reaearch Institute of electronics (Shizuoka Univ. RIE)
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Speaker
Date Time 2011-02-23 15:40:00 
Presentation Time 25 
Registration for ED 
Paper # ED2010-196, SDM2010-231 
Volume (vol) 110 
Number (no) no.423(ED), no.424(SDM) 
Page pp.25-29 
#Pages
Date of Issue 2011-02-16 (ED, SDM) 


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