Paper Abstract and Keywords |
Presentation |
2011-06-17 14:50
THERMAL EFFUSIVITY MEASURMENT OF MULTILAYER PLATING USING THERMAL MICROSCOPE Kazuya Murakami, Kunihiko Wada (Toshiba) R2011-18 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
On a non-defective analysis of electronic components, people use X-ray transmission inspection and infrared thermography as non-destructive method for inspecting defects, and X-ray fluorescence analysis as a method of measuring the film thickness. However, these methods are difficult to measure file thickness in micro area and to identify the characteristics of each layer constituting the multilayer film. In this report, we conducted thermal characterization of multilayer plating, using thermal microscope. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Thermal microscope / Thermal effusivity / Multilayer plating / Non-defective Analyses / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 111, no. 83, R2011-18, pp. 17-21, June 2011. |
Paper # |
R2011-18 |
Date of Issue |
2011-06-10 (R) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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R2011-18 |
Conference Information |
Committee |
R |
Conference Date |
2011-06-17 - 2011-06-17 |
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(See Japanese page) |
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Paper Information |
Registration To |
R |
Conference Code |
2011-06-R |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
THERMAL EFFUSIVITY MEASURMENT OF MULTILAYER PLATING USING THERMAL MICROSCOPE |
Sub Title (in English) |
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Keyword(1) |
Thermal microscope |
Keyword(2) |
Thermal effusivity |
Keyword(3) |
Multilayer plating |
Keyword(4) |
Non-defective Analyses |
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1st Author's Name |
Kazuya Murakami |
1st Author's Affiliation |
Toshiba Corporation Power Systems Companiy Power and industrial Systems R&D Center (Toshiba) |
2nd Author's Name |
Kunihiko Wada |
2nd Author's Affiliation |
Toshiba Corporation Power Systems Companiy Power and industrial Systems R&D Center (Toshiba) |
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Speaker |
Author-1 |
Date Time |
2011-06-17 14:50:00 |
Presentation Time |
25 minutes |
Registration for |
R |
Paper # |
R2011-18 |
Volume (vol) |
vol.111 |
Number (no) |
no.83 |
Page |
pp.17-21 |
#Pages |
5 |
Date of Issue |
2011-06-10 (R) |
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