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Paper Abstract and Keywords
Presentation 2011-08-11 09:25
Preparation of Transparent Conducting AZO Thin Films by RF Magnetron Sputtering
Takeshi Umehara, Satoru Noge (Numazu NCT) CPM2011-67 Link to ES Tech. Rep. Archives: CPM2011-67
Abstract (in Japanese) (See Japanese page) 
(in English) In this study, the results of the study of thin film deposition conditions of AZO thin film by RF magnetron sputtering method were reported. AZO thin films have been prepared by RF reactive magnetron sputtering with various growth parameters, including Al-doping amount on Zn target, oxygen pressure ratio and substrate temperatures. The resistivity, transmittance and crystal orientation of these films was investigated as a function of various growth parameters and causes of characteristic change were examined. As a result, a minimum resistivity of 4.38×$10^{-4}$$\Omega$cm and the average transmittance of 93% in the visible range was obtained for the films deposited at oxygen pressure ratio of 12%, Al-doping ratio of 4% and substrate temperature of 350℃.
Keyword (in Japanese) (See Japanese page) 
(in English) AZO thin film / Transparent Conductive Oxide / RF magnetron sputtering / / / / /  
Reference Info. IEICE Tech. Rep., vol. 111, no. 176, CPM2011-67, pp. 55-60, Aug. 2011.
Paper # CPM2011-67 
Date of Issue 2011-08-03 (CPM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF CPM2011-67 Link to ES Tech. Rep. Archives: CPM2011-67

Conference Information
Committee CPM  
Conference Date 2011-08-10 - 2011-08-11 
Place (in Japanese) (See Japanese page) 
Place (in English)  
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Paper Information
Registration To CPM 
Conference Code 2011-08-CPM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Preparation of Transparent Conducting AZO Thin Films by RF Magnetron Sputtering 
Sub Title (in English)  
Keyword(1) AZO thin film  
Keyword(2) Transparent Conductive Oxide  
Keyword(3) RF magnetron sputtering  
1st Author's Name Takeshi Umehara  
1st Author's Affiliation Numazu National College of Technology (Numazu NCT)
2nd Author's Name Satoru Noge  
2nd Author's Affiliation Numazu National College of Technology (Numazu NCT)
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Speaker Author-1 
Date Time 2011-08-11 09:25:00 
Presentation Time 25 minutes 
Registration for CPM 
Paper # CPM2011-67 
Volume (vol) vol.111 
Number (no) no.176 
Page pp.55-60 
Date of Issue 2011-08-03 (CPM) 

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