Paper Abstract and Keywords |
Presentation |
2011-09-27 10:25
Evaluation of Glass Multilayer Films by the Line-Focus-Beam Ultrasonic Material Characterization System Mototaka Arakawa, Jun-ichi Kushibiki (Tohoku Univ.), Kazuhiko Itoh, Kazuyuki Etoh (JAE) US2011-56 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Multilayer films for optical cavity with ultra-high finesse were evaluated by the line-focus-beam ultrasonic material characterization (LFB-UMC) system. Two SiO2/Ta2O5 multilayer films were deposited on SiO2 substrates by rf ion beam sputtering, and one of them was annealed. Frequency characteristics of leaky surface acoustic wave (LSAW) velocity were measured for specimens by the LFB-UMC system, and LSAW velocity changes due to the annealing were detected. SiO2 and Ta2O5 single layers were also deposited, and LSAW velocities were measured by the LFB-UMC system. It was found that elastic constant, density, and light transmittance changes of multilayer films caused by annealing were mainly affected by their changes of Ta2O5 layers. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Line-Focus-Beam Ultrasonic Material Characterization System / Leaky Surface Acoustic Wave / Multilayer Film / Ta2O5 / SiO2 / Optical Cavity / / |
Reference Info. |
IEICE Tech. Rep., vol. 111, no. 215, US2011-56, pp. 53-57, Sept. 2011. |
Paper # |
US2011-56 |
Date of Issue |
2011-09-19 (US) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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US2011-56 |
Conference Information |
Committee |
US |
Conference Date |
2011-09-26 - 2011-09-27 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Tohoku Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
General |
Paper Information |
Registration To |
US |
Conference Code |
2011-09-US |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Evaluation of Glass Multilayer Films by the Line-Focus-Beam Ultrasonic Material Characterization System |
Sub Title (in English) |
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Keyword(1) |
Line-Focus-Beam Ultrasonic Material Characterization System |
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Leaky Surface Acoustic Wave |
Keyword(3) |
Multilayer Film |
Keyword(4) |
Ta2O5 |
Keyword(5) |
SiO2 |
Keyword(6) |
Optical Cavity |
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1st Author's Name |
Mototaka Arakawa |
1st Author's Affiliation |
Tohoku University (Tohoku Univ.) |
2nd Author's Name |
Jun-ichi Kushibiki |
2nd Author's Affiliation |
Tohoku University (Tohoku Univ.) |
3rd Author's Name |
Kazuhiko Itoh |
3rd Author's Affiliation |
Japan Aviation Electronics Industry Ltd. (JAE) |
4th Author's Name |
Kazuyuki Etoh |
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Japan Aviation Electronics Industry Ltd. (JAE) |
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Speaker |
Author-1 |
Date Time |
2011-09-27 10:25:00 |
Presentation Time |
25 minutes |
Registration for |
US |
Paper # |
US2011-56 |
Volume (vol) |
vol.111 |
Number (no) |
no.215 |
Page |
pp.53-57 |
#Pages |
5 |
Date of Issue |
2011-09-19 (US) |
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