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| Presentation | 2011-11-24 14:25 TiO2-SiO2 ultra-low-expansion glasses for EUVL system evaluated by ultrasonic zero-CTE temperature measurement system Jun-ichi Kushibiki, Mototaka Arakawa, Yuji Ohashi, Yuko Maruyama (Tohoku Univ.)  US2011-71 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We developed an indirect ultrasonic measurement method as a practical system for super-precisely measuring the zero-CTE temperatures, {T(zero-CTE)} of TiO2-SiO2 ultra-low-expansion (ULE) glasses. In this paper, we obtained relationships among T(zero-CTE), acoustic properties (leaky surface acoustic wave velocity, longitudinal velocity, shear velocity, and density), TiO2 concentration C(TiO2), fictive temperature (TF), and OH concentration C(OH) of TiO2-SiO2 ULE glass. We demonstrate that TiO2-SiO2 ULE glasses with T(zero-CTE) ranging from -74°C to 145°C will be available in C(TiO2) ranges of 6 to 9 wt%, TF ranges of 770 to 1110°C, and C(OH) ranges of 0 to 1000 wtppm. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | line-focus-beam ultrasonic material characterization system / velocity measurement / leaky surface acoustic waves / TiO2-SiO2 ultra-low-expansion glass / coefficient of thermal expansion / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 111, no. 311, US2011-71, pp. 31-36, Nov. 2011. | |
| Paper # | US2011-71 | |
| Date of Issue | 2011-11-17 (US) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2011-71 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2011-11-24 - 2011-11-24 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tokai Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | General |
| Paper Information | |
| Registration To | US |
| Conference Code | 2011-11-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | TiO2-SiO2 ultra-low-expansion glasses for EUVL system evaluated by ultrasonic zero-CTE temperature measurement system |
| Sub Title (in English) | |
| Keyword(1) | line-focus-beam ultrasonic material characterization system |
| Keyword(2) | velocity measurement |
| Keyword(3) | leaky surface acoustic waves |
| Keyword(4) | TiO2-SiO2 ultra-low-expansion glass |
| Keyword(5) | coefficient of thermal expansion |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Jun-ichi Kushibiki |
| 1st Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 2nd Author's Name | Mototaka Arakawa |
| 2nd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 3rd Author's Name | Yuji Ohashi |
| 3rd Author's Affiliation | Tohoku University (Tohoku Univ.) |
| 4th Author's Name | Yuko Maruyama |
| 4th Author's Affiliation | Tohoku University (Tohoku Univ.) |
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| Speaker | Author-1 |
| Date Time | 2011-11-24 14:25:00 |
| Presentation Time | 25 minutes |
| Registration for | US |
| Paper # | US2011-71 |
| Volume (vol) | vol.111 |
| Number (no) | no.311 |
| Page | pp.31-36 |
| #Pages | 6 |
| Date of Issue | 2011-11-17 (US) |
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