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Paper Abstract and Keywords
Presentation 2012-04-27 16:30
Crystallization of Si Thin Film on Poly-Imide Substrate by Semiconductor Blue Multi-Laser Diode Annealing
Tatsuya Okada, Jean de Dieu Mugiraneza, Katsuya Shirai, Toshiharu Suzuki, Takashi Noguchi (Univ. Ryukyus), Hideki Matsushima, Takao Hashimoto, Yoshiaki Ogino, Eiji Sahota (Hitachi CP) SDM2012-8 OME2012-8 Link to ES Tech. Rep. Archives: SDM2012-8 OME2012-8
Abstract (in Japanese) (See Japanese page) 
(in English) Crystallization of a-Si films on polyimide substrate was achieved using Blue Multi-Laser Diode Annealing. Surface roughness of crystallized films was smooth, and the crystallinity was almost 100% with uniform grains size of ~50 nm.
Keyword (in Japanese) (See Japanese page) 
(in English) Blue Multi-Laser Diode Annealing / Sputtering / TFT / / / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 18, SDM2012-8, pp. 37-39, April 2012.
Paper # SDM2012-8 
Date of Issue 2012-04-20 (SDM, OME) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF SDM2012-8 OME2012-8 Link to ES Tech. Rep. Archives: SDM2012-8 OME2012-8

Conference Information
Committee SDM OME  
Conference Date 2012-04-27 - 2012-04-28 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawa-Ken-Seinen-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Advanced Thin-Film Devices (Si, Compound, Organic) and Related Topics 
Paper Information
Registration To SDM 
Conference Code 2012-04-SDM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Crystallization of Si Thin Film on Poly-Imide Substrate by Semiconductor Blue Multi-Laser Diode Annealing 
Sub Title (in English)  
Keyword(1) Blue Multi-Laser Diode Annealing  
Keyword(2) Sputtering  
Keyword(3) TFT  
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1st Author's Name Tatsuya Okada  
1st Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
2nd Author's Name Jean de Dieu Mugiraneza  
2nd Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
3rd Author's Name Katsuya Shirai  
3rd Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
4th Author's Name Toshiharu Suzuki  
4th Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
5th Author's Name Takashi Noguchi  
5th Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
6th Author's Name Hideki Matsushima  
6th Author's Affiliation Hitachi Computer Peripherals Co., Ltd. (Hitachi CP)
7th Author's Name Takao Hashimoto  
7th Author's Affiliation Hitachi Computer Peripherals Co., Ltd. (Hitachi CP)
8th Author's Name Yoshiaki Ogino  
8th Author's Affiliation Hitachi Computer Peripherals Co., Ltd. (Hitachi CP)
9th Author's Name Eiji Sahota  
9th Author's Affiliation Hitachi Computer Peripherals Co., Ltd. (Hitachi CP)
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Speaker Author-1 
Date Time 2012-04-27 16:30:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2012-8, OME2012-8 
Volume (vol) vol.112 
Number (no) no.18(SDM), no.19(OME) 
Page pp.37-39 
#Pages
Date of Issue 2012-04-20 (SDM, OME) 


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