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Paper Abstract and Keywords
Presentation 2012-06-27 17:15
Crystallization of a-Si Films with Smooth Surface Using Blue-Multi-Laser-Diode-Annealing
Tatsuya Okada, Jean de Dieu Mugiraneza, Katsuya Shirai, Takuma Nishinohara, Tomoyuki Mukae, Keisuke Yagi, Takashi Noguchi (Univ. Ryukyus)
Abstract (in Japanese) (See Japanese page) 
(in English) Crystallization of 50-nm-thick a-Si was achieved with smooth surface using Blue Multi-Laser Diode Annealing (BLDA). The a-Si films were deposited by RF sputtering or chemical vapor deposition, and annealed by BLDA of CW mode. After annealing in relatively lower laser power, RMS value was slightly increased, but smoothness was kept even if the condition that the films were crystallized. BLDA has a potential to realize a next generation poly-Si TFTs.
Keyword (in Japanese) (See Japanese page) 
(in English) Blue Multi-Laser Diode Annealing / Crystallization / TFT / / / / /  
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Conference Information
Committee SDM ED  
Conference Date 2012-06-27 - 2012-06-29 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawa Seinen-kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English) 2012 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices 
Paper Information
Registration To SDM 
Conference Code 2012-06-SDM-ED 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Crystallization of a-Si Films with Smooth Surface Using Blue-Multi-Laser-Diode-Annealing 
Sub Title (in English)  
Keyword(1) Blue Multi-Laser Diode Annealing  
Keyword(2) Crystallization  
Keyword(3) TFT  
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1st Author's Name Tatsuya Okada  
1st Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
2nd Author's Name Jean de Dieu Mugiraneza  
2nd Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
3rd Author's Name Katsuya Shirai  
3rd Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
4th Author's Name Takuma Nishinohara  
4th Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
5th Author's Name Tomoyuki Mukae  
5th Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
6th Author's Name Keisuke Yagi  
6th Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
7th Author's Name Takashi Noguchi  
7th Author's Affiliation University of the Ryukyus (Univ. Ryukyus)
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Speaker Author-1 
Date Time 2012-06-27 17:15:00 
Presentation Time 15 minutes 
Registration for SDM 
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