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Paper Abstract and Keywords
Presentation 2012-06-29 12:15
The Effects of Fluorine Implantation on 1/f noise and reliability characteristics of NMOSFET
Jae-Hyung Jang, Hyuk-Min Kwon, Ho-Young Kwak, Sung-Kyu Kwon, Seon-Man Hwang, Jong-Kwan Shin (Chungnam National Univ.), Seung-Yong Sung, Yi-Sun Chung, Da-Soon Lee, Jong-Kon Lee (Magnachip Semiconductor Inc), Hi-Deok Lee (Chungnam National Univ.)
Abstract (in Japanese) (See Japanese page) 
(in English) In this paper, the effects of fluorine implantation on flicker noise and hot-carrier reliability of N-channel MOSFETs were investigated. Flicker noise of NMOSFET was decreased about 66% by fluorine implantation. However, hot-carrier degradation was enhanced by fluorine implantation, which can be related to the difference of molecular binding within the gate oxide. Therefore, concurrent investigation of hot-carrier reliability and flicker noise is necessary in developing NMOSFETs for analog/digital mixed signal applications.
Keyword (in Japanese) (See Japanese page) 
(in English) Fluorine / flicker noise / 1/f noise / reliability / NMOSFET / hot-carrier / /  
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Conference Information
Committee SDM ED  
Conference Date 2012-06-27 - 2012-06-29 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawa Seinen-kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English) 2012 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices 
Paper Information
Registration To SDM 
Conference Code 2012-06-SDM-ED 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) The Effects of Fluorine Implantation on 1/f noise and reliability characteristics of NMOSFET 
Sub Title (in English)  
Keyword(1) Fluorine  
Keyword(2) flicker noise  
Keyword(3) 1/f noise  
Keyword(4) reliability  
Keyword(5) NMOSFET  
Keyword(6) hot-carrier  
Keyword(7)  
Keyword(8)  
1st Author's Name Jae-Hyung Jang  
1st Author's Affiliation Chungnam National University (Chungnam National Univ.)
2nd Author's Name Hyuk-Min Kwon  
2nd Author's Affiliation Chungnam National University (Chungnam National Univ.)
3rd Author's Name Ho-Young Kwak  
3rd Author's Affiliation Chungnam National University (Chungnam National Univ.)
4th Author's Name Sung-Kyu Kwon  
4th Author's Affiliation Chungnam National University (Chungnam National Univ.)
5th Author's Name Seon-Man Hwang  
5th Author's Affiliation Chungnam National University (Chungnam National Univ.)
6th Author's Name Jong-Kwan Shin  
6th Author's Affiliation Chungnam National University (Chungnam National Univ.)
7th Author's Name Seung-Yong Sung  
7th Author's Affiliation Magnachip Semiconductor Inc (Magnachip Semiconductor Inc)
8th Author's Name Yi-Sun Chung  
8th Author's Affiliation Magnachip Semiconductor Inc (Magnachip Semiconductor Inc)
9th Author's Name Da-Soon Lee  
9th Author's Affiliation Magnachip Semiconductor Inc (Magnachip Semiconductor Inc)
10th Author's Name Jong-Kon Lee  
10th Author's Affiliation Magnachip Semiconductor Inc (Magnachip Semiconductor Inc)
11th Author's Name Hi-Deok Lee  
11th Author's Affiliation Chungnam National University (Chungnam National Univ.)
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Speaker Author-1 
Date Time 2012-06-29 12:15:00 
Presentation Time 15 minutes 
Registration for SDM 
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