Paper Abstract and Keywords |
Presentation |
2012-07-27 10:30
A MEMS mirror array for wavelength selective switches with a structure to suppress electrical interference between adjacent channels Mitsuo Usui, Shingo Uchiyama, Etsu Hashimoto, Tomomi Sakata, Nobuhiro Shimoyama, Koichi Hadama, Nobuaki Matsuura, Yuzo Ishii, Tohru Matsuura (NTT) MW2012-48 OPE2012-41 EST2012-30 MWP2012-29 Link to ES Tech. Rep. Archives: MW2012-48 OPE2012-41 EST2012-30 MWP2012-29 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We developed a new two-axis microelectromechanical systems (MEMS) mirror array for wavelength selective switches. This MEMS mirror array has a suitable structure for a narrow pitch and high fill factor. On the basis of simulation results, we designed a new electrode structure to reduce electrical interference between adjacent channels. To fabricate the MEMS mirror array module, we developed a small-sealing-packaging technology. We fabricated 50-ch-MEMS mirror array modules using this packaging technology, and confirmed the electrical interference reduction in the fabricated MEMS mirror array modules. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Wavelength selective switch (WSS) / MEMS / Mirror array / Electrical Interference / Packaging Technology / / / |
Reference Info. |
IEICE Tech. Rep., vol. 112, no. 157, EST2012-30, pp. 137-142, July 2012. |
Paper # |
EST2012-30 |
Date of Issue |
2012-07-19 (MW, OPE, EST, MWP) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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MW2012-48 OPE2012-41 EST2012-30 MWP2012-29 Link to ES Tech. Rep. Archives: MW2012-48 OPE2012-41 EST2012-30 MWP2012-29 |
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