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Paper Abstract and Keywords
Presentation 2012-07-27 10:30
A MEMS mirror array for wavelength selective switches with a structure to suppress electrical interference between adjacent channels
Mitsuo Usui, Shingo Uchiyama, Etsu Hashimoto, Tomomi Sakata, Nobuhiro Shimoyama, Koichi Hadama, Nobuaki Matsuura, Yuzo Ishii, Tohru Matsuura (NTT) MW2012-48 OPE2012-41 EST2012-30 MWP2012-29 Link to ES Tech. Rep. Archives: MW2012-48 OPE2012-41 EST2012-30 MWP2012-29
Abstract (in Japanese) (See Japanese page) 
(in English) We developed a new two-axis microelectromechanical systems (MEMS) mirror array for wavelength selective switches. This MEMS mirror array has a suitable structure for a narrow pitch and high fill factor. On the basis of simulation results, we designed a new electrode structure to reduce electrical interference between adjacent channels. To fabricate the MEMS mirror array module, we developed a small-sealing-packaging technology. We fabricated 50-ch-MEMS mirror array modules using this packaging technology, and confirmed the electrical interference reduction in the fabricated MEMS mirror array modules.
Keyword (in Japanese) (See Japanese page) 
(in English) Wavelength selective switch (WSS) / MEMS / Mirror array / Electrical Interference / Packaging Technology / / /  
Reference Info. IEICE Tech. Rep., vol. 112, no. 157, EST2012-30, pp. 137-142, July 2012.
Paper # EST2012-30 
Date of Issue 2012-07-19 (MW, OPE, EST, MWP) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF MW2012-48 OPE2012-41 EST2012-30 MWP2012-29 Link to ES Tech. Rep. Archives: MW2012-48 OPE2012-41 EST2012-30 MWP2012-29

Conference Information
Committee MWP OPE MW EMT EST IEE-EMT  
Conference Date 2012-07-26 - 2012-07-27 
Place (in Japanese) (See Japanese page) 
Place (in English) Hokkaido Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To EST 
Conference Code 2012-07-MWP-OPE-MW-EMT-EST-EMT 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) A MEMS mirror array for wavelength selective switches with a structure to suppress electrical interference between adjacent channels 
Sub Title (in English)  
Keyword(1) Wavelength selective switch (WSS)  
Keyword(2) MEMS  
Keyword(3) Mirror array  
Keyword(4) Electrical Interference  
Keyword(5) Packaging Technology  
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Keyword(8)  
1st Author's Name Mitsuo Usui  
1st Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
2nd Author's Name Shingo Uchiyama  
2nd Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
3rd Author's Name Etsu Hashimoto  
3rd Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
4th Author's Name Tomomi Sakata  
4th Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
5th Author's Name Nobuhiro Shimoyama  
5th Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
6th Author's Name Koichi Hadama  
6th Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
7th Author's Name Nobuaki Matsuura  
7th Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
8th Author's Name Yuzo Ishii  
8th Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
9th Author's Name Tohru Matsuura  
9th Author's Affiliation Nippon Telegraph and Telephone Corporation (NTT)
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Speaker Author-1 
Date Time 2012-07-27 10:30:00 
Presentation Time 25 minutes 
Registration for EST 
Paper # MW2012-48, OPE2012-41, EST2012-30, MWP2012-29 
Volume (vol) vol.112 
Number (no) no.155(MW), no.156(OPE), no.157(EST), no.158(MWP) 
Page pp.137-142 
#Pages
Date of Issue 2012-07-19 (MW, OPE, EST, MWP) 


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