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Paper Abstract and Keywords
Presentation 2013-04-19 11:35
Formation of qualified epitaxial graphene on 6H-SiC(0001) by high temperature annealing in Ar ambient
Kazutoshi Funakubo, Shuya Inomata, Ryo Inomata, Goon-Ho Park (Tohoku Univ.), Masato Kotsugi (JASRI), Hirokazu Fukidome, Maki Suemitsu (Tohoku Univ.) ED2013-15 Link to ES Tech. Rep. Archives: ED2013-15
Abstract (in Japanese) (See Japanese page) 
(in English) Recently, graphene has attracted increasing attention as a new FET channel material to substitute Si. However, the field-effect mobilities reported for graphene FET are far below those that expected by its intrinsic mobility. With an aim at realizing high-mobility graphene FETs by enlargement of the domain size of graphene, we have conducted epitaxial graphene formation on 6H-SiC(0001) by high temperature annealing in Ar ambient.
Keyword (in Japanese) (See Japanese page) 
(in English) Graphene / Ar ambient / High temperature annealing / 6H-SiC / / / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 9, ED2013-15, pp. 59-62, April 2013.
Paper # ED2013-15 
Date of Issue 2013-04-11 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2013-15 Link to ES Tech. Rep. Archives: ED2013-15

Conference Information
Committee ED  
Conference Date 2013-04-18 - 2013-04-19 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English) Organic Devices, Oxide Devices, and others 
Paper Information
Registration To ED 
Conference Code 2013-04-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Formation of qualified epitaxial graphene on 6H-SiC(0001) by high temperature annealing in Ar ambient 
Sub Title (in English)  
Keyword(1) Graphene  
Keyword(2) Ar ambient  
Keyword(3) High temperature annealing  
Keyword(4) 6H-SiC  
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1st Author's Name Kazutoshi Funakubo  
1st Author's Affiliation Tohoku University (Tohoku Univ.)
2nd Author's Name Shuya Inomata  
2nd Author's Affiliation Tohoku University (Tohoku Univ.)
3rd Author's Name Ryo Inomata  
3rd Author's Affiliation Tohoku University (Tohoku Univ.)
4th Author's Name Goon-Ho Park  
4th Author's Affiliation Tohoku University (Tohoku Univ.)
5th Author's Name Masato Kotsugi  
5th Author's Affiliation JASRI (JASRI)
6th Author's Name Hirokazu Fukidome  
6th Author's Affiliation Tohoku University (Tohoku Univ.)
7th Author's Name Maki Suemitsu  
7th Author's Affiliation Tohoku University (Tohoku Univ.)
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Speaker Author-1 
Date Time 2013-04-19 11:35:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2013-15 
Volume (vol) vol.113 
Number (no) no.9 
Page pp.59-62 
#Pages
Date of Issue 2013-04-11 (ED) 


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