Paper Abstract and Keywords |
Presentation |
2013-07-12 14:55
Relationship between high magnetic anisotropy and observed internal stress formation of FeCoB films Hisanori Hayashibara, Reo Yohena, Shigeki Nakagawa (Tokyo Tech) MR2013-9 Link to ES Tech. Rep. Archives: MR2013-9 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
In-situ observation of developing internal stress in FeCoB layer was performed during the deposition of the film. Relationship between the anisotropic internal stress and magnetic anisotropy inTi/Ru/FeCoB films was examined. Magnetic anisotropy was controlled by changing distance between targets and substrate and sputtering gas pressure. Anisotropic residual stress tend to develop after the thickness exceed above 100 nm. When compressive stress functioned, relationship between anisotropic stress and magnetic anisotropy was confirmed. While tensile stress functioned, it was confirmed that influence of stress on magnetic anisotropy became smaller than the case of compression stress. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
residual internal stress / magnetic snisotropy / in-situ observation / FeCoB / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 113, July 2013. |
Paper # |
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Date of Issue |
2013-07-05 (MR) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
MR2013-9 Link to ES Tech. Rep. Archives: MR2013-9 |
Conference Information |
Committee |
MRIS ITE-MMS |
Conference Date |
2013-07-12 - 2013-07-12 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Chuo Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Solid State Memory, Media, etc. |
Paper Information |
Registration To |
MRIS |
Conference Code |
2013-07-MR-MMS |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Relationship between high magnetic anisotropy and observed internal stress formation of FeCoB films |
Sub Title (in English) |
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Keyword(1) |
residual internal stress |
Keyword(2) |
magnetic snisotropy |
Keyword(3) |
in-situ observation |
Keyword(4) |
FeCoB |
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1st Author's Name |
Hisanori Hayashibara |
1st Author's Affiliation |
Tokyo Institute of Technology (Tokyo Tech) |
2nd Author's Name |
Reo Yohena |
2nd Author's Affiliation |
Tokyo Institute of Technology (Tokyo Tech) |
3rd Author's Name |
Shigeki Nakagawa |
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Tokyo Institute of Technology (Tokyo Tech) |
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Speaker |
Author-1 |
Date Time |
2013-07-12 14:55:00 |
Presentation Time |
25 minutes |
Registration for |
MRIS |
Paper # |
MR2013-9 |
Volume (vol) |
vol.113 |
Number (no) |
no.127 |
Page |
pp.19-24 |
#Pages |
6 |
Date of Issue |
2013-07-05 (MR) |