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Paper Abstract and Keywords
Presentation 2014-02-28 10:15
Charging properties of potassium ion SiO2 electret film
Gen Hashiguchi, Tatsuhiko Sugiyama, Yasushi Shibata (Shizuoka Univ.) ED2013-145 SDM2013-160 Link to ES Tech. Rep. Archives: ED2013-145 SDM2013-160
Abstract (in Japanese) (See Japanese page) 
(in English) We have developed a new fabrication method of electret made of SiO2 film. In this method, KOH solution is bubbled by career gas of oxidation, resuilting in incorporation of Potassium ions in SiO2 film simultaneously.
Electret voltage is then given by applying voltage at arround 700 ℃. This paper describes in-situ monitoring of the charging process and charging voltage measurement using an electrostatic actuator. Time degradation measurement of the electret film is also presented using a comb-drive actuator.
Keyword (in Japanese) (See Japanese page) 
(in English) Electret / Potassium ion / Electrostatic actuator / MEMS / / / /  
Reference Info. IEICE Tech. Rep., vol. 113, no. 450, SDM2013-160, pp. 73-76, Feb. 2014.
Paper # SDM2013-160 
Date of Issue 2014-02-20 (ED, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2013-145 SDM2013-160 Link to ES Tech. Rep. Archives: ED2013-145 SDM2013-160

Conference Information
Committee ED SDM  
Conference Date 2014-02-27 - 2014-02-28 
Place (in Japanese) (See Japanese page) 
Place (in English) Hokkaido Univ. Centennial Hall 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Functional nanodevices and related technologies 
Paper Information
Registration To SDM 
Conference Code 2014-02-ED-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Charging properties of potassium ion SiO2 electret film 
Sub Title (in English)  
Keyword(1) Electret  
Keyword(2) Potassium ion  
Keyword(3) Electrostatic actuator  
Keyword(4) MEMS  
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1st Author's Name Gen Hashiguchi  
1st Author's Affiliation Shizuoka University (Shizuoka Univ.)
2nd Author's Name Tatsuhiko Sugiyama  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ.)
3rd Author's Name Yasushi Shibata  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ.)
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Speaker Author-1 
Date Time 2014-02-28 10:15:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # ED2013-145, SDM2013-160 
Volume (vol) vol.113 
Number (no) no.449(ED), no.450(SDM) 
Page pp.73-76 
#Pages
Date of Issue 2014-02-20 (ED, SDM) 


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