Paper Abstract and Keywords |
Presentation |
2014-02-28 10:15
Charging properties of potassium ion SiO2 electret film Gen Hashiguchi, Tatsuhiko Sugiyama, Yasushi Shibata (Shizuoka Univ.) ED2013-145 SDM2013-160 Link to ES Tech. Rep. Archives: ED2013-145 SDM2013-160 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We have developed a new fabrication method of electret made of SiO2 film. In this method, KOH solution is bubbled by career gas of oxidation, resuilting in incorporation of Potassium ions in SiO2 film simultaneously.
Electret voltage is then given by applying voltage at arround 700 ℃. This paper describes in-situ monitoring of the charging process and charging voltage measurement using an electrostatic actuator. Time degradation measurement of the electret film is also presented using a comb-drive actuator. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Electret / Potassium ion / Electrostatic actuator / MEMS / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 113, no. 450, SDM2013-160, pp. 73-76, Feb. 2014. |
Paper # |
SDM2013-160 |
Date of Issue |
2014-02-20 (ED, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2013-145 SDM2013-160 Link to ES Tech. Rep. Archives: ED2013-145 SDM2013-160 |
Conference Information |
Committee |
ED SDM |
Conference Date |
2014-02-27 - 2014-02-28 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Hokkaido Univ. Centennial Hall |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Functional nanodevices and related technologies |
Paper Information |
Registration To |
SDM |
Conference Code |
2014-02-ED-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Charging properties of potassium ion SiO2 electret film |
Sub Title (in English) |
|
Keyword(1) |
Electret |
Keyword(2) |
Potassium ion |
Keyword(3) |
Electrostatic actuator |
Keyword(4) |
MEMS |
Keyword(5) |
|
Keyword(6) |
|
Keyword(7) |
|
Keyword(8) |
|
1st Author's Name |
Gen Hashiguchi |
1st Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
2nd Author's Name |
Tatsuhiko Sugiyama |
2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
3rd Author's Name |
Yasushi Shibata |
3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ.) |
4th Author's Name |
|
4th Author's Affiliation |
() |
5th Author's Name |
|
5th Author's Affiliation |
() |
6th Author's Name |
|
6th Author's Affiliation |
() |
7th Author's Name |
|
7th Author's Affiliation |
() |
8th Author's Name |
|
8th Author's Affiliation |
() |
9th Author's Name |
|
9th Author's Affiliation |
() |
10th Author's Name |
|
10th Author's Affiliation |
() |
11th Author's Name |
|
11th Author's Affiliation |
() |
12th Author's Name |
|
12th Author's Affiliation |
() |
13th Author's Name |
|
13th Author's Affiliation |
() |
14th Author's Name |
|
14th Author's Affiliation |
() |
15th Author's Name |
|
15th Author's Affiliation |
() |
16th Author's Name |
|
16th Author's Affiliation |
() |
17th Author's Name |
|
17th Author's Affiliation |
() |
18th Author's Name |
|
18th Author's Affiliation |
() |
19th Author's Name |
|
19th Author's Affiliation |
() |
20th Author's Name |
|
20th Author's Affiliation |
() |
Speaker |
Author-1 |
Date Time |
2014-02-28 10:15:00 |
Presentation Time |
25 minutes |
Registration for |
SDM |
Paper # |
ED2013-145, SDM2013-160 |
Volume (vol) |
vol.113 |
Number (no) |
no.449(ED), no.450(SDM) |
Page |
pp.73-76 |
#Pages |
4 |
Date of Issue |
2014-02-20 (ED, SDM) |
|