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| Presentation | 2014-08-21 16:20 Quick control of the vibration amplitude in high-Q MEMS resonators Hajime Okamoto, Imran Mahboob, Koji Onomitsu, Hiroshi Yamaguchi (NTT)  R2014-33 EMD2014-38 CPM2014-53 OPE2014-63 LQE2014-37 Link to ES Tech. Rep. Archives: EMD2014-38 CPM2014-53 OPE2014-63 LQE2014-37 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | High-Q MEMS resonators have a strong advantage in their applications, e.g., highly precise sensors and low power consumption logics. However, the high-Q characteristic limits the switching speed of the mechanical resonator because of the long ring-down time owing to the small energy dissipation. Here we propose a new scheme to solve this trade-off using parametric coupling between two MEMS resonators. The realization of strong parametric coupling enables quick energy transfer from one resonator to the other, leading to the quick control of the vibration amplitude within the intrinsic ring-down time. We demonstrate rapid repetitive operations of a high-Q MEMS resonator by applying this technique to GaAs-based MEMS resonators through the piezoelectrically controlled parametric coupling. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | MEMS / Resonator / Coupling / Control / GaAs / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 114, no. 187, LQE2014-37, pp. 55-58, Aug. 2014. | |
| Paper # | LQE2014-37 | |
| Date of Issue | 2014-08-14 (R, EMD, CPM, OPE, LQE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | R2014-33 EMD2014-38 CPM2014-53 OPE2014-63 LQE2014-37 Link to ES Tech. Rep. Archives: EMD2014-38 CPM2014-53 OPE2014-63 LQE2014-37 |
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| Conference Information | |
| Committee | EMD LQE OPE CPM R |
| Conference Date | 2014-08-21 - 2014-08-22 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Otaru Economy Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | LQE |
| Conference Code | 2014-08-EMD-LQE-OPE-CPM-R |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Quick control of the vibration amplitude in high-Q MEMS resonators |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | Resonator |
| Keyword(3) | Coupling |
| Keyword(4) | Control |
| Keyword(5) | GaAs |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Hajime Okamoto |
| 1st Author's Affiliation | Nippon Telegraph and Telephone Corporation (NTT) |
| 2nd Author's Name | Imran Mahboob |
| 2nd Author's Affiliation | Nippon Telegraph and Telephone Corporation (NTT) |
| 3rd Author's Name | Koji Onomitsu |
| 3rd Author's Affiliation | Nippon Telegraph and Telephone Corporation (NTT) |
| 4th Author's Name | Hiroshi Yamaguchi |
| 4th Author's Affiliation | Nippon Telegraph and Telephone Corporation (NTT) |
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| Speaker | Author-1 |
| Date Time | 2014-08-21 16:20:00 |
| Presentation Time | 20 minutes |
| Registration for | LQE |
| Paper # | R2014-33, EMD2014-38, CPM2014-53, OPE2014-63, LQE2014-37 |
| Volume (vol) | vol.114 |
| Number (no) | no.183(R), no.184(EMD), no.185(CPM), no.186(OPE), no.187(LQE) |
| Page | pp.55-58 |
| #Pages | 4 |
| Date of Issue | 2014-08-14 (R, EMD, CPM, OPE, LQE) |
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