IEICE Technical Committee Submission System
Conference Paper's Information
Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2015-01-22 15:24
Grown of hexagonal boron nitride films by CVD for the application of deep ultraviolet light emitters
Atsushi Masuda, Naoki Umehara, Takaki Shimizu, Tetsuya Kouno, Hiroko Kominami, Yoichiro Nakanishi, Kazuhiko Hara (Shizuoka Univ) EID2014-45 Link to ES Tech. Rep. Archives: EID2014-45
Abstract (in Japanese) (See Japanese page) 
(in English) The hexagonal boron nitride (h-BN) thin films were grown on a c-plane sapphire substrate by chemical vapor deposition using BCl3 and NH3 as sources at substrate temperatures from 900 to 1400 °C under 20 and 10 kPa. X-ray diffraction and cathodoluminescence measurements have showed that the crystalline quality of the h-BN films depend strongly on growth pressure and temperature. The growth of single crystal films and the observation of exitonic emissions around 215 nm were achieved by low pressure CVD.
Keyword (in Japanese) (See Japanese page) 
(in English) hexagonal boron nitride / CVD / thin film / cathodoluminescence / / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 407, EID2014-45, pp. 41-44, Jan. 2015.
Paper # EID2014-45 
Date of Issue 2015-01-15 (EID) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EID2014-45 Link to ES Tech. Rep. Archives: EID2014-45

Conference Information
Committee EID ITE-IDY IEIJ-SSL IEE-EDD SID-JC  
Conference Date 2015-01-22 - 2015-01-23 
Place (in Japanese) (See Japanese page) 
Place (in English) Ryukoku University 
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To EID 
Conference Code 2015-01-EID-IDY-SSL-EDD-JC 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Grown of hexagonal boron nitride films by CVD for the application of deep ultraviolet light emitters 
Sub Title (in English)  
Keyword(1) hexagonal boron nitride  
Keyword(2) CVD  
Keyword(3) thin film  
Keyword(4) cathodoluminescence  
Keyword(5)  
Keyword(6)  
Keyword(7)  
Keyword(8)  
1st Author's Name Atsushi Masuda  
1st Author's Affiliation Shizuoka University (Shizuoka Univ)
2nd Author's Name Naoki Umehara  
2nd Author's Affiliation Shizuoka University (Shizuoka Univ)
3rd Author's Name Takaki Shimizu  
3rd Author's Affiliation Shizuoka University (Shizuoka Univ)
4th Author's Name Tetsuya Kouno  
4th Author's Affiliation Shizuoka University (Shizuoka Univ)
5th Author's Name Hiroko Kominami  
5th Author's Affiliation Shizuoka University (Shizuoka Univ)
6th Author's Name Yoichiro Nakanishi  
6th Author's Affiliation Shizuoka University (Shizuoka Univ)
7th Author's Name Kazuhiko Hara  
7th Author's Affiliation Shizuoka University (Shizuoka Univ)
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
Speaker Author-1 
Date Time 2015-01-22 15:24:00 
Presentation Time 8 minutes 
Registration for EID 
Paper # EID2014-45 
Volume (vol) vol.114 
Number (no) no.407 
Page pp.41-44 
#Pages
Date of Issue 2015-01-15 (EID) 


[Return to Top Page]

[Return to IEICE Web Page]


The Institute of Electronics, Information and Communication Engineers (IEICE), Japan