Paper Abstract and Keywords |
Presentation |
2015-01-22 15:24
Grown of hexagonal boron nitride films by CVD for the application of deep ultraviolet light emitters Atsushi Masuda, Naoki Umehara, Takaki Shimizu, Tetsuya Kouno, Hiroko Kominami, Yoichiro Nakanishi, Kazuhiko Hara (Shizuoka Univ) EID2014-45 Link to ES Tech. Rep. Archives: EID2014-45 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
The hexagonal boron nitride (h-BN) thin films were grown on a c-plane sapphire substrate by chemical vapor deposition using BCl3 and NH3 as sources at substrate temperatures from 900 to 1400 °C under 20 and 10 kPa. X-ray diffraction and cathodoluminescence measurements have showed that the crystalline quality of the h-BN films depend strongly on growth pressure and temperature. The growth of single crystal films and the observation of exitonic emissions around 215 nm were achieved by low pressure CVD. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
hexagonal boron nitride / CVD / thin film / cathodoluminescence / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 114, no. 407, EID2014-45, pp. 41-44, Jan. 2015. |
Paper # |
EID2014-45 |
Date of Issue |
2015-01-15 (EID) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
EID2014-45 Link to ES Tech. Rep. Archives: EID2014-45 |
Conference Information |
Committee |
EID ITE-IDY IEIJ-SSL IEE-EDD SID-JC |
Conference Date |
2015-01-22 - 2015-01-23 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Ryukoku University |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
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Paper Information |
Registration To |
EID |
Conference Code |
2015-01-EID-IDY-SSL-EDD-JC |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Grown of hexagonal boron nitride films by CVD for the application of deep ultraviolet light emitters |
Sub Title (in English) |
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Keyword(1) |
hexagonal boron nitride |
Keyword(2) |
CVD |
Keyword(3) |
thin film |
Keyword(4) |
cathodoluminescence |
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1st Author's Name |
Atsushi Masuda |
1st Author's Affiliation |
Shizuoka University (Shizuoka Univ) |
2nd Author's Name |
Naoki Umehara |
2nd Author's Affiliation |
Shizuoka University (Shizuoka Univ) |
3rd Author's Name |
Takaki Shimizu |
3rd Author's Affiliation |
Shizuoka University (Shizuoka Univ) |
4th Author's Name |
Tetsuya Kouno |
4th Author's Affiliation |
Shizuoka University (Shizuoka Univ) |
5th Author's Name |
Hiroko Kominami |
5th Author's Affiliation |
Shizuoka University (Shizuoka Univ) |
6th Author's Name |
Yoichiro Nakanishi |
6th Author's Affiliation |
Shizuoka University (Shizuoka Univ) |
7th Author's Name |
Kazuhiko Hara |
7th Author's Affiliation |
Shizuoka University (Shizuoka Univ) |
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Speaker |
Author-1 |
Date Time |
2015-01-22 15:24:00 |
Presentation Time |
8 minutes |
Registration for |
EID |
Paper # |
EID2014-45 |
Volume (vol) |
vol.114 |
Number (no) |
no.407 |
Page |
pp.41-44 |
#Pages |
4 |
Date of Issue |
2015-01-15 (EID) |