Paper Abstract and Keywords |
Presentation |
2015-02-05 17:00
Low pull-in voltage graphene nanoelectromechanical switch Jian Sun, Nozomu Kanetake, Takuo Chikuba, Manoharan Muruganathan, Hiroshi Mizuta (JAIST) ED2014-145 SDM2014-154 Link to ES Tech. Rep. Archives: ED2014-145 SDM2014-154 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
In this work, we developed the graphene nanoelectromechanical (NEM) contact switch. A new bottom-up procedure using a polymer sacrificial spacer was proposed to fabricate graphene NEM switch without any acid-etching process. As a consequence, the mechanical stability of the NEM switch has been greatly improved. Moreover, a low pull-in voltage of below 2 V was realized in the fabricated switch with good consistency on a run-to-run basis, which is compatible with the conventional complementary metal-oxide-semiconductor circuit requirements. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Graphene / NEMS / Switch / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 114, no. 442, ED2014-145, pp. 39-43, Feb. 2015. |
Paper # |
ED2014-145 |
Date of Issue |
2015-01-29 (ED, SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ED2014-145 SDM2014-154 Link to ES Tech. Rep. Archives: ED2014-145 SDM2014-154 |
Conference Information |
Committee |
SDM ED |
Conference Date |
2015-02-05 - 2015-02-06 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Hokkaido Univ. |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Functional nanodevices and related technologies |
Paper Information |
Registration To |
ED |
Conference Code |
2015-02-SDM-ED |
Language |
English |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Low pull-in voltage graphene nanoelectromechanical switch |
Sub Title (in English) |
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Keyword(1) |
Graphene |
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NEMS |
Keyword(3) |
Switch |
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1st Author's Name |
Jian Sun |
1st Author's Affiliation |
Japan Advanced Institute of Science and Technology (JAIST) |
2nd Author's Name |
Nozomu Kanetake |
2nd Author's Affiliation |
Japan Advanced Institute of Science and Technology (JAIST) |
3rd Author's Name |
Takuo Chikuba |
3rd Author's Affiliation |
Japan Advanced Institute of Science and Technology (JAIST) |
4th Author's Name |
Manoharan Muruganathan |
4th Author's Affiliation |
Japan Advanced Institute of Science and Technology (JAIST) |
5th Author's Name |
Hiroshi Mizuta |
5th Author's Affiliation |
Japan Advanced Institute of Science and Technology (JAIST) |
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Speaker |
Author-1 |
Date Time |
2015-02-05 17:00:00 |
Presentation Time |
25 minutes |
Registration for |
ED |
Paper # |
ED2014-145, SDM2014-154 |
Volume (vol) |
vol.114 |
Number (no) |
no.442(ED), no.443(SDM) |
Page |
pp.39-43 |
#Pages |
5 |
Date of Issue |
2015-01-29 (ED, SDM) |
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