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Paper Abstract and Keywords
Presentation 2015-02-05 17:00
Low pull-in voltage graphene nanoelectromechanical switch
Jian Sun, Nozomu Kanetake, Takuo Chikuba, Manoharan Muruganathan, Hiroshi Mizuta (JAIST) ED2014-145 SDM2014-154 Link to ES Tech. Rep. Archives: ED2014-145 SDM2014-154
Abstract (in Japanese) (See Japanese page) 
(in English) In this work, we developed the graphene nanoelectromechanical (NEM) contact switch. A new bottom-up procedure using a polymer sacrificial spacer was proposed to fabricate graphene NEM switch without any acid-etching process. As a consequence, the mechanical stability of the NEM switch has been greatly improved. Moreover, a low pull-in voltage of below 2 V was realized in the fabricated switch with good consistency on a run-to-run basis, which is compatible with the conventional complementary metal-oxide-semiconductor circuit requirements.
Keyword (in Japanese) (See Japanese page) 
(in English) Graphene / NEMS / Switch / / / / /  
Reference Info. IEICE Tech. Rep., vol. 114, no. 442, ED2014-145, pp. 39-43, Feb. 2015.
Paper # ED2014-145 
Date of Issue 2015-01-29 (ED, SDM) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2014-145 SDM2014-154 Link to ES Tech. Rep. Archives: ED2014-145 SDM2014-154

Conference Information
Committee SDM ED  
Conference Date 2015-02-05 - 2015-02-06 
Place (in Japanese) (See Japanese page) 
Place (in English) Hokkaido Univ. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Functional nanodevices and related technologies 
Paper Information
Registration To ED 
Conference Code 2015-02-SDM-ED 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Low pull-in voltage graphene nanoelectromechanical switch 
Sub Title (in English)  
Keyword(1) Graphene  
Keyword(2) NEMS  
Keyword(3) Switch  
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1st Author's Name Jian Sun  
1st Author's Affiliation Japan Advanced Institute of Science and Technology (JAIST)
2nd Author's Name Nozomu Kanetake  
2nd Author's Affiliation Japan Advanced Institute of Science and Technology (JAIST)
3rd Author's Name Takuo Chikuba  
3rd Author's Affiliation Japan Advanced Institute of Science and Technology (JAIST)
4th Author's Name Manoharan Muruganathan  
4th Author's Affiliation Japan Advanced Institute of Science and Technology (JAIST)
5th Author's Name Hiroshi Mizuta  
5th Author's Affiliation Japan Advanced Institute of Science and Technology (JAIST)
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Speaker Author-1 
Date Time 2015-02-05 17:00:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2014-145, SDM2014-154 
Volume (vol) vol.114 
Number (no) no.442(ED), no.443(SDM) 
Page pp.39-43 
#Pages
Date of Issue 2015-01-29 (ED, SDM) 


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