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Paper Abstract and Keywords
Presentation 2016-08-10 09:30
Improving wavelength selectivity of MEMS Fabry-Perot interferometric biosensor using Au half-mirrors
Toshiaki Takahashi, Yoshihiro Masuya, Hayato Ishida, Kazuaki Sawada, Kazuhiro Takahashi (Toyohashi Tech.) ED2016-39
Abstract (in Japanese) (See Japanese page) 
(in English) We have developed MEMS optical interferometric biosensor for biomarker detection with label-free, high sensitivity, and multi-marker detection. The proposed biosensor measure a membrane deformation caused by immobilization of biomolecules by antigen-antibody reaction on the movable membrane of the interferometer. Highly reflective metal mirror provides to improve displacement sensitivity of the movable membrane. An analytical results show small FWHM of 16 nm by using Au half-mirror which has high reflectivity on near-IR band and high etching selectivity to XeF2 as a sacrificial etching gas to form air gap. In addition, Au half-mirror with a small fill factor of 10% suppress a degradation of stress sensitivity. The gradient of interference spectrum improved to be 1.32 times by employment of 30 nm Au half-mirror on the deformable parylene-C membrane.
Keyword (in Japanese) (See Japanese page) 
(in English) Fabry-Perot interferometer / Au half-mirror / biosensor / wavelength selectivity / / / /  
Reference Info. IEICE Tech. Rep., vol. 116, no. 181, ED2016-39, pp. 47-50, Aug. 2016.
Paper # ED2016-39 
Date of Issue 2016-08-02 (ED) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
and
reproduction		 All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ED2016-39

Conference Information
Committee ED  
Conference Date 2016-08-09 - 2016-08-10 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Sensor, MEMS, general 
Paper Information
Registration To ED 
Conference Code 2016-08-ED 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Improving wavelength selectivity of MEMS Fabry-Perot interferometric biosensor using Au half-mirrors 
Sub Title (in English)  
Keyword(1) Fabry-Perot interferometer  
Keyword(2) Au half-mirror  
Keyword(3) biosensor  
Keyword(4) wavelength selectivity  
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1st Author's Name Toshiaki Takahashi  
1st Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
2nd Author's Name Yoshihiro Masuya  
2nd Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
3rd Author's Name Hayato Ishida  
3rd Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
4th Author's Name Kazuaki Sawada  
4th Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
5th Author's Name Kazuhiro Takahashi  
5th Author's Affiliation Toyohashi University of Technology (Toyohashi Tech.)
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Speaker Author-1 
Date Time 2016-08-10 09:30:00 
Presentation Time 25 minutes 
Registration for ED 
Paper # ED2016-39 
Volume (vol) vol.116 
Number (no) no.181 
Page pp.47-50 
#Pages 4 
Date of Issue 2016-08-02 (ED) 

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