Paper Abstract and Keywords |
Presentation |
2017-02-06 11:15
[Invited Talk]
NiGe/Ge contact formation by microwave annealing method for low-thermal budget processing Osamu Nakatsuka (Grad. Sch. of Eng., Nagoya University), Yoshimasa Watanabe (TEL), Akihiro Suzuki (Grad. Sch. of Eng., Nagoya University), Yoshio Nishi (Dept. of Electrical Engineering, Stanford University), Shigeaki Zaima (IMaSS, Nagoya University) SDM2016-141 Link to ES Tech. Rep. Archives: SDM2016-141 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
(Not available yet) |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
/ / / / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 116, no. 450, SDM2016-141, pp. 11-15, Feb. 2017. |
Paper # |
SDM2016-141 |
Date of Issue |
2017-01-30 (SDM) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
SDM2016-141 Link to ES Tech. Rep. Archives: SDM2016-141 |
|