Paper Abstract and Keywords |
Presentation |
2017-04-20 13:00
[Invited Talk]
Study on Nano-Dot Structure Permanent Memory Tsuyoshi Watanabe, Noriyuki Miura, Shijia Liu, Shigeki Imai, Makoto Nagata (Kobe Univ.) ICD2017-4 Link to ES Tech. Rep. Archives: ICD2017-4 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We propose a permanent digital memory system in which data is saved by a presence of metal nano-dot at interconnects of word line and bit line. The data is retrieved by mutual capacitance difference due to the nano-dot presence. A test chip is prepared by 0.18μm CMOS process. Its read-out properties have over 1000-years durability which is verified by aging acceleration test. It is shown that an areal density of memory can be increased up to 1.3Tbit/in2 by miniaturization of nano-dots and word/bit lines using EB lithography and nanoimprint lithography. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Permanent memory / nano-dot / EB lithography / Nanoimprint lithography / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 117, no. 9, ICD2017-4, pp. 17-22, April 2017. |
Paper # |
ICD2017-4 |
Date of Issue |
2017-04-13 (ICD) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
ICD2017-4 Link to ES Tech. Rep. Archives: ICD2017-4 |
Conference Information |
Committee |
ICD |
Conference Date |
2017-04-20 - 2017-04-21 |
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(See Japanese page) |
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Paper Information |
Registration To |
ICD |
Conference Code |
2017-04-ICD |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Study on Nano-Dot Structure Permanent Memory |
Sub Title (in English) |
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Keyword(1) |
Permanent memory |
Keyword(2) |
nano-dot |
Keyword(3) |
EB lithography |
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Nanoimprint lithography |
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1st Author's Name |
Tsuyoshi Watanabe |
1st Author's Affiliation |
Kobe University (Kobe Univ.) |
2nd Author's Name |
Noriyuki Miura |
2nd Author's Affiliation |
Kobe University (Kobe Univ.) |
3rd Author's Name |
Shijia Liu |
3rd Author's Affiliation |
Kobe University (Kobe Univ.) |
4th Author's Name |
Shigeki Imai |
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Kobe University (Kobe Univ.) |
5th Author's Name |
Makoto Nagata |
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Kobe University (Kobe Univ.) |
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Speaker |
Author-1 |
Date Time |
2017-04-20 13:00:00 |
Presentation Time |
50 minutes |
Registration for |
ICD |
Paper # |
ICD2017-4 |
Volume (vol) |
vol.117 |
Number (no) |
no.9 |
Page |
pp.17-22 |
#Pages |
6 |
Date of Issue |
2017-04-13 (ICD) |