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Paper Abstract and Keywords
Presentation 2017-04-20 13:00
[Invited Talk] Study on Nano-Dot Structure Permanent Memory
Tsuyoshi Watanabe, Noriyuki Miura, Shijia Liu, Shigeki Imai, Makoto Nagata (Kobe Univ.) ICD2017-4 Link to ES Tech. Rep. Archives: ICD2017-4
Abstract (in Japanese) (See Japanese page) 
(in English) We propose a permanent digital memory system in which data is saved by a presence of metal nano-dot at interconnects of word line and bit line. The data is retrieved by mutual capacitance difference due to the nano-dot presence. A test chip is prepared by 0.18μm CMOS process. Its read-out properties have over 1000-years durability which is verified by aging acceleration test. It is shown that an areal density of memory can be increased up to 1.3Tbit/in2 by miniaturization of nano-dots and word/bit lines using EB lithography and nanoimprint lithography.
Keyword (in Japanese) (See Japanese page) 
(in English) Permanent memory / nano-dot / EB lithography / Nanoimprint lithography / / / /  
Reference Info. IEICE Tech. Rep., vol. 117, no. 9, ICD2017-4, pp. 17-22, April 2017.
Paper # ICD2017-4 
Date of Issue 2017-04-13 (ICD) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
Copyright
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reproduction
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF ICD2017-4 Link to ES Tech. Rep. Archives: ICD2017-4

Conference Information
Committee ICD  
Conference Date 2017-04-20 - 2017-04-21 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To ICD 
Conference Code 2017-04-ICD 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Study on Nano-Dot Structure Permanent Memory 
Sub Title (in English)  
Keyword(1) Permanent memory  
Keyword(2) nano-dot  
Keyword(3) EB lithography  
Keyword(4) Nanoimprint lithography  
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1st Author's Name Tsuyoshi Watanabe  
1st Author's Affiliation Kobe University (Kobe Univ.)
2nd Author's Name Noriyuki Miura  
2nd Author's Affiliation Kobe University (Kobe Univ.)
3rd Author's Name Shijia Liu  
3rd Author's Affiliation Kobe University (Kobe Univ.)
4th Author's Name Shigeki Imai  
4th Author's Affiliation Kobe University (Kobe Univ.)
5th Author's Name Makoto Nagata  
5th Author's Affiliation Kobe University (Kobe Univ.)
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Date Time 2017-04-20 13:00:00 
Presentation Time 50 minutes 
Registration for ICD 
Paper # ICD2017-4 
Volume (vol) vol.117 
Number (no) no.9 
Page pp.17-22 
#Pages
Date of Issue 2017-04-13 (ICD) 


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