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| Presentation | 2017-07-27 15:40 Simultaneous viscosity evaluation in the MHz to GHz range by using shear mode HBAR consisting of ScAlN thin film/low TCF substrate Yui Yamakawa, Ko-hei Sano, Rei Karasawa (Waseda Univ.), Takahiko Yanagitani (Waseda Univ./JST)  US2017-42 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. Experimental TCF of the HBAR in air is -3.2 ppm/°C, which demonstrates the great decrease of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions in order to demonstrate usefulness of the HBAR. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Viscosity sensors / HBAR / ScAlN / Glycerin / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 117, no. 155, US2017-42, pp. 61-66, July 2017. | |
| Paper # | US2017-42 | |
| Date of Issue | 2017-07-20 (US) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | US2017-42 |
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| Conference Information | |
| Committee | US |
| Conference Date | 2017-07-27 - 2017-07-27 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | US |
| Conference Code | 2017-07-US |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Simultaneous viscosity evaluation in the MHz to GHz range by using shear mode HBAR consisting of ScAlN thin film/low TCF substrate |
| Sub Title (in English) | |
| Keyword(1) | Viscosity sensors |
| Keyword(2) | HBAR |
| Keyword(3) | ScAlN |
| Keyword(4) | Glycerin |
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| Keyword(8) | |
| 1st Author's Name | Yui Yamakawa |
| 1st Author's Affiliation | Waseda University (Waseda Univ.) |
| 2nd Author's Name | Ko-hei Sano |
| 2nd Author's Affiliation | Waseda University (Waseda Univ.) |
| 3rd Author's Name | Rei Karasawa |
| 3rd Author's Affiliation | Waseda University (Waseda Univ.) |
| 4th Author's Name | Takahiko Yanagitani |
| 4th Author's Affiliation | Waseda University,JST PRESTO (Waseda Univ./JST) |
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| Speaker | Author-1 |
| Date Time | 2017-07-27 15:40:00 |
| Presentation Time | 25 minutes |
| Registration for | US |
| Paper # | US2017-42 |
| Volume (vol) | vol.117 |
| Number (no) | no.155 |
| Page | pp.61-66 |
| #Pages | 6 |
| Date of Issue | 2017-07-20 (US) |
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