IEICE Technical Committee Submission System
Conference Paper's Information
Online Proceedings
[Sign in]
Tech. Rep. Archives
 Go Top Page Go Previous   [Japanese] / [English] 

Paper Abstract and Keywords
Presentation 2017-07-27 15:40
Simultaneous viscosity evaluation in the MHz to GHz range by using shear mode HBAR consisting of ScAlN thin film/low TCF substrate
Yui Yamakawa, Ko-hei Sano, Rei Karasawa (Waseda Univ.), Takahiko Yanagitani (Waseda Univ./JST) US2017-42
Abstract (in Japanese) (See Japanese page) 
(in English) In order to study relaxation characteristics of viscoelasticity of the liquid, a wide frequency sweep in the range of MHz to GHz is desired. We, therefore, report a new type HBAR (High-overtone Bulk Acoustic Resonator) sensor which makes it possible to operate in a wide frequency range. We choose AT-cut quartz as the substrate whose TCF is zero at room temperature to suppress frequency shifts due to the temperature change. Experimental TCF of the HBAR in air is -3.2 ppm/°C, which demonstrates the great decrease of TCF compared with single ScAlN films (-62 ppm/°C) due to the zero TCF AT-cut quartz substrate. In this study, frequency shifts and frequency peak attenuations were measured for various concentration of glycerin solutions in order to demonstrate usefulness of the HBAR.
Keyword (in Japanese) (See Japanese page) 
(in English) Viscosity sensors / HBAR / ScAlN / Glycerin / / / /  
Reference Info. IEICE Tech. Rep., vol. 117, no. 155, US2017-42, pp. 61-66, July 2017.
Paper # US2017-42 
Date of Issue 2017-07-20 (US) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF US2017-42

Conference Information
Committee US  
Conference Date 2017-07-27 - 2017-07-27 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
Topics (in English)  
Paper Information
Registration To US 
Conference Code 2017-07-US 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Simultaneous viscosity evaluation in the MHz to GHz range by using shear mode HBAR consisting of ScAlN thin film/low TCF substrate 
Sub Title (in English)  
Keyword(1) Viscosity sensors  
Keyword(2) HBAR  
Keyword(3) ScAlN  
Keyword(4) Glycerin  
1st Author's Name Yui Yamakawa  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Ko-hei Sano  
2nd Author's Affiliation Waseda University (Waseda Univ.)
3rd Author's Name Rei Karasawa  
3rd Author's Affiliation Waseda University (Waseda Univ.)
4th Author's Name Takahiko Yanagitani  
4th Author's Affiliation Waseda University,JST PRESTO (Waseda Univ./JST)
5th Author's Name  
5th Author's Affiliation ()
6th Author's Name  
6th Author's Affiliation ()
7th Author's Name  
7th Author's Affiliation ()
8th Author's Name  
8th Author's Affiliation ()
9th Author's Name  
9th Author's Affiliation ()
10th Author's Name  
10th Author's Affiliation ()
11th Author's Name  
11th Author's Affiliation ()
12th Author's Name  
12th Author's Affiliation ()
13th Author's Name  
13th Author's Affiliation ()
14th Author's Name  
14th Author's Affiliation ()
15th Author's Name  
15th Author's Affiliation ()
16th Author's Name  
16th Author's Affiliation ()
17th Author's Name  
17th Author's Affiliation ()
18th Author's Name  
18th Author's Affiliation ()
19th Author's Name  
19th Author's Affiliation ()
20th Author's Name  
20th Author's Affiliation ()
Speaker Author-1 
Date Time 2017-07-27 15:40:00 
Presentation Time 25 minutes 
Registration for US 
Paper # US2017-42 
Volume (vol) vol.117 
Number (no) no.155 
Page pp.61-66 
Date of Issue 2017-07-20 (US) 

[Return to Top Page]

[Return to IEICE Web Page]

The Institute of Electronics, Information and Communication Engineers (IEICE), Japan