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Paper Abstract and Keywords
Presentation 2018-12-06 17:10
Deposition of Ce:YIG on Si for Magneto-Optical Devices
Michiomi Noguchi, Yuya Shoji, Tetsuya Mizumoto (Tokyo Tech) OPE2018-123 LQE2018-133 SIPH2018-39 Link to ES Tech. Rep. Archives: OPE2018-123 LQE2018-133
Abstract (in Japanese) (See Japanese page) 
(in English) We report the deposition of a polycrystalline Ce-monosubstituted Yttrium Iron Garnet (CeY2Fe5O12, Ce:YIG) by a direct deposition method on a Silicon substrate. Expecting improvement of crystallinity, YIG (Y3Fe5O12) is formed as an seedlayer by metal organic decomposition method (MOD method), and Ce:YIG polycrystal is formed thereon by sputtering method, succeeded in forming the Ce:YIG/YIG/Si structure. The Faraday rotation coefficient of the obtained polycrystalline Ce:YIG is -1400 deg/cm, which corresponds to 31% of the single crystal. The thickness of the seedlayer of the obtained structure was 120 nm.
It was also found that reduction of the thickness of the seedlayer is effective for improving the characteristics of the nonreciprocal waveguide with the obtained structure. In order to reduce the thickness of the seedlayer, we also tried to improve the MOD process and report it.
Keyword (in Japanese) (See Japanese page) 
(in English) Optical Integrated Circuit / Magneto-optical Material / Magneto-optical Device / Silicon Photonics / Ce:YIG / Metal Organic Decomposition / /  
Reference Info. IEICE Tech. Rep., vol. 118, no. 348, OPE2018-123, pp. 131-134, Dec. 2018.
Paper # OPE2018-123 
Date of Issue 2018-11-29 (OPE, LQE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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Download PDF OPE2018-123 LQE2018-133 SIPH2018-39 Link to ES Tech. Rep. Archives: OPE2018-123 LQE2018-133

Conference Information
Committee LQE OPE SIPH  
Conference Date 2018-12-06 - 2018-12-07 
Place (in Japanese) (See Japanese page) 
Place (in English) Keio University 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Photonic Device Workshop 
Paper Information
Registration To OPE 
Conference Code 2018-12-LQE-OPE-SIPH 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Deposition of Ce:YIG on Si for Magneto-Optical Devices 
Sub Title (in English)  
Keyword(1) Optical Integrated Circuit  
Keyword(2) Magneto-optical Material  
Keyword(3) Magneto-optical Device  
Keyword(4) Silicon Photonics  
Keyword(5) Ce:YIG  
Keyword(6) Metal Organic Decomposition  
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Keyword(8)  
1st Author's Name Michiomi Noguchi  
1st Author's Affiliation Tokyo Institute of Technology (Tokyo Tech)
2nd Author's Name Yuya Shoji  
2nd Author's Affiliation Tokyo Institute of Technology (Tokyo Tech)
3rd Author's Name Tetsuya Mizumoto  
3rd Author's Affiliation Tokyo Institute of Technology (Tokyo Tech)
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Speaker Author-1 
Date Time 2018-12-06 17:10:00 
Presentation Time 80 minutes 
Registration for OPE 
Paper # OPE2018-123, LQE2018-133, SIPH2018-39 
Volume (vol) vol.118 
Number (no) no.348(OPE), no.349(LQE) 
Page pp.131-134 
#Pages
Date of Issue 2018-11-29 (OPE, LQE) 


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