Paper Abstract and Keywords |
Presentation |
2018-12-06 17:10
Deposition of Ce:YIG on Si for Magneto-Optical Devices Michiomi Noguchi, Yuya Shoji, Tetsuya Mizumoto (Tokyo Tech) OPE2018-123 LQE2018-133 SIPH2018-39 Link to ES Tech. Rep. Archives: OPE2018-123 LQE2018-133 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We report the deposition of a polycrystalline Ce-monosubstituted Yttrium Iron Garnet (CeY2Fe5O12, Ce:YIG) by a direct deposition method on a Silicon substrate. Expecting improvement of crystallinity, YIG (Y3Fe5O12) is formed as an seedlayer by metal organic decomposition method (MOD method), and Ce:YIG polycrystal is formed thereon by sputtering method, succeeded in forming the Ce:YIG/YIG/Si structure. The Faraday rotation coefficient of the obtained polycrystalline Ce:YIG is -1400 deg/cm, which corresponds to 31% of the single crystal. The thickness of the seedlayer of the obtained structure was 120 nm.
It was also found that reduction of the thickness of the seedlayer is effective for improving the characteristics of the nonreciprocal waveguide with the obtained structure. In order to reduce the thickness of the seedlayer, we also tried to improve the MOD process and report it. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Optical Integrated Circuit / Magneto-optical Material / Magneto-optical Device / Silicon Photonics / Ce:YIG / Metal Organic Decomposition / / |
Reference Info. |
IEICE Tech. Rep., vol. 118, no. 348, OPE2018-123, pp. 131-134, Dec. 2018. |
Paper # |
OPE2018-123 |
Date of Issue |
2018-11-29 (OPE, LQE) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
OPE2018-123 LQE2018-133 SIPH2018-39 Link to ES Tech. Rep. Archives: OPE2018-123 LQE2018-133 |
Conference Information |
Committee |
LQE OPE SIPH |
Conference Date |
2018-12-06 - 2018-12-07 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Keio University |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Photonic Device Workshop |
Paper Information |
Registration To |
OPE |
Conference Code |
2018-12-LQE-OPE-SIPH |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Deposition of Ce:YIG on Si for Magneto-Optical Devices |
Sub Title (in English) |
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Keyword(1) |
Optical Integrated Circuit |
Keyword(2) |
Magneto-optical Material |
Keyword(3) |
Magneto-optical Device |
Keyword(4) |
Silicon Photonics |
Keyword(5) |
Ce:YIG |
Keyword(6) |
Metal Organic Decomposition |
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1st Author's Name |
Michiomi Noguchi |
1st Author's Affiliation |
Tokyo Institute of Technology (Tokyo Tech) |
2nd Author's Name |
Yuya Shoji |
2nd Author's Affiliation |
Tokyo Institute of Technology (Tokyo Tech) |
3rd Author's Name |
Tetsuya Mizumoto |
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Tokyo Institute of Technology (Tokyo Tech) |
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Speaker |
Author-1 |
Date Time |
2018-12-06 17:10:00 |
Presentation Time |
80 minutes |
Registration for |
OPE |
Paper # |
OPE2018-123, LQE2018-133, SIPH2018-39 |
Volume (vol) |
vol.118 |
Number (no) |
no.348(OPE), no.349(LQE) |
Page |
pp.131-134 |
#Pages |
4 |
Date of Issue |
2018-11-29 (OPE, LQE) |
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