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| Presentation | 2019-04-18 13:00 Fabrication of yttria insulating films by low-temperature yttria atomic layer deposition Kentaro Saito, Kazuki Yosida, Kensaku Kanomata, Masanori Miura, Bashir Ahmmad Arima, Shigeru Kubota, Fumihiko Hirose (Yamagata Univ.)  ED2019-1 Link to ES Tech. Rep. Archives: ED2019-1 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 119, no. 9, ED2019-1, pp. 1-4, April 2019. | |
| Paper # | ED2019-1 | |
| Date of Issue | 2019-04-11 (ED) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ED2019-1 Link to ES Tech. Rep. Archives: ED2019-1 |
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| Conference Information | |
| Committee | ED |
| Conference Date | 2019-04-18 - 2019-04-18 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | RIEC, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Organic devices, oxide devices, general |
| Paper Information | |
| Registration To | ED |
| Conference Code | 2019-04-ED |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of yttria insulating films by low-temperature yttria atomic layer deposition |
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| 1st Author's Name | Kentaro Saito |
| 1st Author's Affiliation | Yamagata University (Yamagata Univ.) |
| 2nd Author's Name | Kazuki Yosida |
| 2nd Author's Affiliation | Yamagata University (Yamagata Univ.) |
| 3rd Author's Name | Kensaku Kanomata |
| 3rd Author's Affiliation | Yamagata University (Yamagata Univ.) |
| 4th Author's Name | Masanori Miura |
| 4th Author's Affiliation | Yamagata University (Yamagata Univ.) |
| 5th Author's Name | Bashir Ahmmad Arima |
| 5th Author's Affiliation | Yamagata University (Yamagata Univ.) |
| 6th Author's Name | Shigeru Kubota |
| 6th Author's Affiliation | Yamagata University (Yamagata Univ.) |
| 7th Author's Name | Fumihiko Hirose |
| 7th Author's Affiliation | Yamagata University (Yamagata Univ.) |
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| Speaker | Author-1 |
| Date Time | 2019-04-18 13:00:00 |
| Presentation Time | 25 minutes |
| Registration for | ED |
| Paper # | ED2019-1 |
| Volume (vol) | vol.119 |
| Number (no) | no.9 |
| Page | pp.1-4 |
| #Pages | 4 |
| Date of Issue | 2019-04-11 (ED) |
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