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Paper Abstract and Keywords
Presentation 2019-08-02 15:05
[Invited Lecture] Characterization of Metal Thin Film-Wiring Materials for Foldable Displays
Chiharu Kura, Yumi Teramae, Yuki Tauchi (KOBELCO), Hiroshi Goto, Hiroyuki Okuno (Kobelco Research Institute)
Abstract (in Japanese) (See Japanese page) 
(in English) Recently, flexible displays are receiving a lot of attention, and the demands of flexible displays are expected to increase in the future. For the metal interconnection in foldable displays, bending resistance is necessary in addition to heat resistance and low electrical resistivity. However, Mo interconnection, which is used as a gate electrode of LTPS TFT, is easily disconnected by bending test with a radius of 1 mm. In this study, we report the bending resistance of Al-Nd alloy films, which have been used as gate electrodes of a-Si TFT, and clarify the adaptability of Al-2.0 or 4.0 at% Nd alloy films to the foldable displays.
Keyword (in Japanese) (See Japanese page) 
(in English) foldable display / Al-Nd alloy / metal interconnection / bending resistance / / / /  
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Conference Information
Committee ITE-IDY EID SID-JC  
Conference Date 2019-08-02 - 2019-08-02 
Place (in Japanese) (See Japanese page) 
Place (in English) Kikai-Shinko-Kaikan Bldg. 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Information Display 
Paper Information
Registration To ITE-IDY 
Conference Code 2019-08-IDY-EID-JC 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Characterization of Metal Thin Film-Wiring Materials for Foldable Displays 
Sub Title (in English)  
Keyword(1) foldable display  
Keyword(2) Al-Nd alloy  
Keyword(3) metal interconnection  
Keyword(4) bending resistance  
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1st Author's Name Chiharu Kura  
1st Author's Affiliation Kobe Steel, LTD (KOBELCO)
2nd Author's Name Yumi Teramae  
2nd Author's Affiliation Kobe Steel, LTD (KOBELCO)
3rd Author's Name Yuki Tauchi  
3rd Author's Affiliation Kobe Steel, LTD (KOBELCO)
4th Author's Name Hiroshi Goto  
4th Author's Affiliation Kobelco Research Institute (Kobelco Research Institute)
5th Author's Name Hiroyuki Okuno  
5th Author's Affiliation Kobelco Research Institute (Kobelco Research Institute)
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Speaker Author-1 
Date Time 2019-08-02 15:05:00 
Presentation Time 25 minutes 
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