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Paper Abstract and Keywords
Presentation 2019-10-09 15:00
Characterization of Nb films prepared by ultra-high vacuum sputtering system for qubit application
Wei Qiu, Hirotaka Terai (NICT) SCE2019-23 Link to ES Tech. Rep. Archives: SCE2019-23
Abstract (in Japanese) (See Japanese page) 
(in English) We have developed low-loss coplanar waveguide (CPW) resonators, which can be applied to many applications, such as superconducting quantum bits (qubits) and microwave kinetic inductance detectors. To realize low-loss superconducting resonators, we introduced a dc magnetron sputtering system with an ultra-low background pressure below 8 ?10-8 Pa. In this research, we characterize superconducting Nb films as a low-loss material for a CPW resonator. The Nb film properties, such as the film resistivity , superconducting transition temperature Tc, residual resistance ratio (RRR), film stress, and surface morphology have been studied. We also evaluated the internal loss by measuring the S11 and S21 parameters from CPW resonators made of Nb films.
Keyword (in Japanese) (See Japanese page) 
(in English) superconducting / microwave / kinetic inductance / Niobium / polycrystalline / sputtering / loss /  
Reference Info. IEICE Tech. Rep., vol. 119, no. 219, SCE2019-23, pp. 7-10, Oct. 2019.
Paper # SCE2019-23 
Date of Issue 2019-10-02 (SCE) 
ISSN Print edition: ISSN 0913-5685    Online edition: ISSN 2432-6380
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Download PDF SCE2019-23 Link to ES Tech. Rep. Archives: SCE2019-23

Conference Information
Committee SCE  
Conference Date 2019-10-09 - 2019-10-10 
Place (in Japanese) (See Japanese page) 
Place (in English)  
Topics (in Japanese) (See Japanese page) 
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Paper Information
Registration To SCE 
Conference Code 2019-10-SCE 
Language English 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Characterization of Nb films prepared by ultra-high vacuum sputtering system for qubit application 
Sub Title (in English)  
Keyword(1) superconducting  
Keyword(2) microwave  
Keyword(3) kinetic inductance  
Keyword(4) Niobium  
Keyword(5) polycrystalline  
Keyword(6) sputtering  
Keyword(7) loss  
Keyword(8)  
1st Author's Name Wei Qiu  
1st Author's Affiliation National Institute of Information and Communications Technology (NICT)
2nd Author's Name Hirotaka Terai  
2nd Author's Affiliation National Institute of Information and Communications Technology (NICT)
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Speaker Author-1 
Date Time 2019-10-09 15:00:00 
Presentation Time 25 minutes 
Registration for SCE 
Paper # SCE2019-23 
Volume (vol) vol.119 
Number (no) no.219 
Page pp.7-10 
#Pages
Date of Issue 2019-10-02 (SCE) 


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