Paper Abstract and Keywords |
Presentation |
2019-10-09 15:00
Characterization of Nb films prepared by ultra-high vacuum sputtering system for qubit application Wei Qiu, Hirotaka Terai (NICT) SCE2019-23 Link to ES Tech. Rep. Archives: SCE2019-23 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
We have developed low-loss coplanar waveguide (CPW) resonators, which can be applied to many applications, such as superconducting quantum bits (qubits) and microwave kinetic inductance detectors. To realize low-loss superconducting resonators, we introduced a dc magnetron sputtering system with an ultra-low background pressure below 8 ?10-8 Pa. In this research, we characterize superconducting Nb films as a low-loss material for a CPW resonator. The Nb film properties, such as the film resistivity , superconducting transition temperature Tc, residual resistance ratio (RRR), film stress, and surface morphology have been studied. We also evaluated the internal loss by measuring the S11 and S21 parameters from CPW resonators made of Nb films. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
superconducting / microwave / kinetic inductance / Niobium / polycrystalline / sputtering / loss / |
Reference Info. |
IEICE Tech. Rep., vol. 119, no. 219, SCE2019-23, pp. 7-10, Oct. 2019. |
Paper # |
SCE2019-23 |
Date of Issue |
2019-10-02 (SCE) |
ISSN |
Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
SCE2019-23 Link to ES Tech. Rep. Archives: SCE2019-23 |
Conference Information |
Committee |
SCE |
Conference Date |
2019-10-09 - 2019-10-10 |
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(See Japanese page) |
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Registration To |
SCE |
Conference Code |
2019-10-SCE |
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English |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Characterization of Nb films prepared by ultra-high vacuum sputtering system for qubit application |
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superconducting |
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microwave |
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kinetic inductance |
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Niobium |
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polycrystalline |
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sputtering |
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loss |
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1st Author's Name |
Wei Qiu |
1st Author's Affiliation |
National Institute of Information and Communications Technology (NICT) |
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Hirotaka Terai |
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National Institute of Information and Communications Technology (NICT) |
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Speaker |
Author-1 |
Date Time |
2019-10-09 15:00:00 |
Presentation Time |
25 minutes |
Registration for |
SCE |
Paper # |
SCE2019-23 |
Volume (vol) |
vol.119 |
Number (no) |
no.219 |
Page |
pp.7-10 |
#Pages |
4 |
Date of Issue |
2019-10-02 (SCE) |
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