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| Presentation | 2019-11-15 14:15 Triple-Layered Ring Oscillators and Image Sensors Developed by Direct Bonding of SOI Wafers Masahide Goto (NHK), Yuki Honda (NHK-ES), Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi (NHK), Takuya Saraya, Masaharu Kobayashi (Univ. of Tokyo), Eiji Higurashi (AIST), Hiroshi Toshiyoshi, Toshiro Hiramoto (Univ. of Tokyo)  ICD2019-38 IE2019-44 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | We have studied on pixel-parallel three-dimensional (3D) integrated CMOS image sensors. We previously reported double-layered image sensors by direct bonding of silicon on insulator (SOI) layers with embedded Au electrodes, which confirmed pixel-parallel video images. We have newly designed the triple-layered ring oscillator and image sensor to demonstrate the concept of the multi-layered devices which improve the resolution and enhance the functionality. The developed triple-stacked wafers are confirmed to have no voids or separation of layers even after the removal of the handle layer, thereby demonstrating the feasibility of multi-layered imaging devices for the next-generation video systems. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | CMOS image sensor / 3D integration / ring oscillator / bonding / SOI / A/D converter / / | |
| Reference Info. | IEICE Tech. Rep., vol. 119, no. 284, ICD2019-38, pp. 45-49, Nov. 2019. | |
| Paper # | ICD2019-38 | |
| Date of Issue | 2019-11-07 (ICD, IE) | |
| ISSN | Print edition: ISSN 0913-5685 Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | ICD2019-38 IE2019-44 |
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| Conference Information | |
| Committee | VLD DC CPSY RECONF ICD IE IPSJ-SLDM IPSJ-EMB |
| Conference Date | 2019-11-13 - 2019-11-15 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Ehime Prefecture Gender Equality Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Design Gaia 2019 -New Field of VLSI Design- |
| Paper Information | |
| Registration To | ICD |
| Conference Code | 2019-11-VLD-DC-CPSY-RECONF-ICD-IE-SLDM-EMB-ARC |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Triple-Layered Ring Oscillators and Image Sensors Developed by Direct Bonding of SOI Wafers |
| Sub Title (in English) | |
| Keyword(1) | CMOS image sensor |
| Keyword(2) | 3D integration |
| Keyword(3) | ring oscillator |
| Keyword(4) | bonding |
| Keyword(5) | SOI |
| Keyword(6) | A/D converter |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Masahide Goto |
| 1st Author's Affiliation | NHK STRL (NHK) |
| 2nd Author's Name | Yuki Honda |
| 2nd Author's Affiliation | NHK Engineering System (NHK-ES) |
| 3rd Author's Name | Toshihisa Watabe |
| 3rd Author's Affiliation | NHK STRL (NHK) |
| 4th Author's Name | Kei Hagiwara |
| 4th Author's Affiliation | NHK STRL (NHK) |
| 5th Author's Name | Masakazu Nanba |
| 5th Author's Affiliation | NHK STRL (NHK) |
| 6th Author's Name | Yoshinori Iguchi |
| 6th Author's Affiliation | NHK STRL (NHK) |
| 7th Author's Name | Takuya Saraya |
| 7th Author's Affiliation | The University of Tokyo (Univ. of Tokyo) |
| 8th Author's Name | Masaharu Kobayashi |
| 8th Author's Affiliation | The University of Tokyo (Univ. of Tokyo) |
| 9th Author's Name | Eiji Higurashi |
| 9th Author's Affiliation | National Institute of Advanced Industrial Science and Technology (AIST) |
| 10th Author's Name | Hiroshi Toshiyoshi |
| 10th Author's Affiliation | The University of Tokyo (Univ. of Tokyo) |
| 11th Author's Name | Toshiro Hiramoto |
| 11th Author's Affiliation | The University of Tokyo (Univ. of Tokyo) |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2019-11-15 14:15:00 |
| Presentation Time | 25 minutes |
| Registration for | ICD |
| Paper # | ICD2019-38, IE2019-44 |
| Volume (vol) | vol.119 |
| Number (no) | no.284(ICD), no.285(IE) |
| Page | pp.45-49 |
| #Pages | 5 |
| Date of Issue | 2019-11-07 (ICD, IE) |
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