Paper Abstract and Keywords |
Presentation |
2021-10-22 16:30
Compact Model and Parametric Extraction for Optical Phase Shifters in Carrier-Depletion Mach-Zehnder Silicon Modulators Tadashi Murao, Jun Ushida, Hiroyuki Takahashi, Masatoshi Tokushima, Akemi Shiina, Tsuyoshi Horikawa (PETRA) OCS2021-18 OPE2021-38 LQE2021-17 Link to ES Tech. Rep. Archives: OPE2021-38 LQE2021-17 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Testing processes in silicon photonics are totally different from electronics and reduction of testing time has been an major issue. In this paper, a compact model of optical phase shifters is constructed for carrier-depletion Mach-Zehnder (MZ) silicon modulators in the push-pull regime. The target characteristics of the extinction ratio (ER), absorption loss, and chirp parameter are suitably expressed in terms of parameters representing the voltages-dependent modulation efficiency (ME) and the imaginary part of effective index with simple forms. The parameters reflecting manufacturing variability can be extracted from the no time-consuming DC measurements, realizing the testing in a short time. The theoretical concept relies on the proposal of a generalized form of the large-signal ME and its beneficial approximation for the model construction, where the conventional small- and large-signal definitions cannot be applied to the model construction or lead to cumbersome and non-intuitive formulation. It is shown that the constructed model suitably explains the physics and the reported experimental results for the slightly positive chirp characteristics of balanced phase shifters. Moreover, a parametric extraction applying the model is demonstrated in the C-band wavelength on a 300-mm SOI wafer. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
Wafer-level testing / Compact model / Silicon modulator / Modulation efficiency / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 121, no. 214, OPE2021-38, pp. 27-32, Oct. 2021. |
Paper # |
OPE2021-38 |
Date of Issue |
2021-10-15 (OCS, OPE, LQE) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
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OCS2021-18 OPE2021-38 LQE2021-17 Link to ES Tech. Rep. Archives: OPE2021-38 LQE2021-17 |
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