| IEICE Technical Committee Submission System Conference Paper's Information |
Online Proceedings [Sign in] Tech. Rep. Archives |
| Go Top Page | Go Previous | [Japanese] / [English] |
| Paper Abstract and Keywords | ||
| Presentation | 2022-02-04 09:45 [Invited Talk] Advanced Damascene Integration with Self Assembled Monolayer (SAM) Hiroyuki Nagai, Mitsuaki Iwashita, Yuki Kikuchi (TEL), Kawasaki Hiroaki, Gyana Pattanaik (TTCA), Keiichi Fujita (TKL), Kazutoshi Iwai (TEA), Hiroyuki Komatsu, Yuuki Ozaki (JSR)  SDM2021-75 Link to ES Tech. Rep. Archives: SDM2021-75 |
|
| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Selective deposition of Cu diffusion barrier metal layer on dielectric with Self-Assembled Monolayer (SAM) has been demonstrated. Via resistance is expected to decrease by eliminating the barrier at via bottom in dual- and semi-damascene structure. In this study, we report the evaluation of SAMs to enable selective ALD-barrier metal deposition and, as an example, we show Cu via prefill integration using ELD-Cu with no barrier / liner at via bottom and no seam void for metal filling. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | SAM / Prefill / ELD-Cu / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 121, no. 366, SDM2021-75, pp. 5-8, Feb. 2022. | |
| Paper # | SDM2021-75 | |
| Date of Issue | 2022-01-28 (SDM) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2021-75 Link to ES Tech. Rep. Archives: SDM2021-75 |
|
| Conference Information | |
| Committee | SDM |
| Conference Date | 2022-02-04 - 2022-02-04 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2022-02-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Advanced Damascene Integration with Self Assembled Monolayer (SAM) |
| Sub Title (in English) | |
| Keyword(1) | SAM |
| Keyword(2) | Prefill |
| Keyword(3) | ELD-Cu |
| Keyword(4) | |
| Keyword(5) | |
| Keyword(6) | |
| Keyword(7) | |
| Keyword(8) | |
| 1st Author's Name | Hiroyuki Nagai |
| 1st Author's Affiliation | Tokyo Electron Limited (TEL) |
| 2nd Author's Name | Mitsuaki Iwashita |
| 2nd Author's Affiliation | Tokyo Electron Limited (TEL) |
| 3rd Author's Name | Yuki Kikuchi |
| 3rd Author's Affiliation | Tokyo Electron Limited (TEL) |
| 4th Author's Name | Kawasaki Hiroaki |
| 4th Author's Affiliation | TEL Technology Center, America, LLC (TTCA) |
| 5th Author's Name | Gyana Pattanaik |
| 5th Author's Affiliation | TEL Technology Center, America, LLC (TTCA) |
| 6th Author's Name | Keiichi Fujita |
| 6th Author's Affiliation | Tokyo Electron Kyushu Limited (TKL) |
| 7th Author's Name | Kazutoshi Iwai |
| 7th Author's Affiliation | Tokyo Electron America, Inc. (TEA) |
| 8th Author's Name | Hiroyuki Komatsu |
| 8th Author's Affiliation | JSR corporation (JSR) |
| 9th Author's Name | Yuuki Ozaki |
| 9th Author's Affiliation | JSR corporation (JSR) |
| 10th Author's Name | |
| 10th Author's Affiliation | () |
| 11th Author's Name | |
| 11th Author's Affiliation | () |
| 12th Author's Name | |
| 12th Author's Affiliation | () |
| 13th Author's Name | |
| 13th Author's Affiliation | () |
| 14th Author's Name | |
| 14th Author's Affiliation | () |
| 15th Author's Name | |
| 15th Author's Affiliation | () |
| 16th Author's Name | |
| 16th Author's Affiliation | () |
| 17th Author's Name | |
| 17th Author's Affiliation | () |
| 18th Author's Name | |
| 18th Author's Affiliation | () |
| Speaker | Author-1 |
| Date Time | 2022-02-04 09:45:00 |
| Presentation Time | 40 minutes |
| Registration for | SDM |
| Paper # | SDM2021-75 |
| Volume (vol) | vol.121 |
| Number (no) | no.366 |
| Page | pp.5-8 |
| #Pages | 4 |
| Date of Issue | 2022-01-28 (SDM) |
[Return to Top Page]