Paper Abstract and Keywords |
Presentation |
2022-06-21 17:40
Formation of Al(111) Thin Layer on Si(111) and Control of Surface Si Segregation by Thermal Annealing Taiki Sakai, Keigo Matsushita, Akio Ohta, Noriyuki Taoka, Katsunori Makihara, Seiichi Miyazaki (Nagoya Univ.) SDM2022-32 |
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Reference Info. |
IEICE Tech. Rep., vol. 122, no. 84, SDM2022-32, pp. 31-34, June 2022. |
Paper # |
SDM2022-32 |
Date of Issue |
2022-06-14 (SDM) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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SDM2022-32 |
Conference Information |
Committee |
SDM |
Conference Date |
2022-06-21 - 2022-06-21 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Nagoya Univ. VBL3F |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Material Science and Process Technology for MOS Devices, Memories, and Power Devices |
Paper Information |
Registration To |
SDM |
Conference Code |
2022-06-SDM |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Formation of Al(111) Thin Layer on Si(111) and Control of Surface Si Segregation by Thermal Annealing |
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1st Author's Name |
Taiki Sakai |
1st Author's Affiliation |
Nagoya University (Nagoya Univ.) |
2nd Author's Name |
Keigo Matsushita |
2nd Author's Affiliation |
Nagoya University (Nagoya Univ.) |
3rd Author's Name |
Akio Ohta |
3rd Author's Affiliation |
Nagoya University (Nagoya Univ.) |
4th Author's Name |
Noriyuki Taoka |
4th Author's Affiliation |
Nagoya University (Nagoya Univ.) |
5th Author's Name |
Katsunori Makihara |
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Nagoya University (Nagoya Univ.) |
6th Author's Name |
Seiichi Miyazaki |
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Nagoya University (Nagoya Univ.) |
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Speaker |
Author-1 |
Date Time |
2022-06-21 17:40:00 |
Presentation Time |
20 minutes |
Registration for |
SDM |
Paper # |
SDM2022-32 |
Volume (vol) |
vol.122 |
Number (no) |
no.84 |
Page |
pp.31-34 |
#Pages |
4 |
Date of Issue |
2022-06-14 (SDM) |
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