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Paper Abstract and Keywords
Presentation 2022-06-21 17:40
Formation of Al(111) Thin Layer on Si(111) and Control of Surface Si Segregation by Thermal Annealing
Taiki Sakai, Keigo Matsushita, Akio Ohta, Noriyuki Taoka, Katsunori Makihara, Seiichi Miyazaki (Nagoya Univ.) SDM2022-32
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
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(in English) / / / / / / /  
Reference Info. IEICE Tech. Rep., vol. 122, no. 84, SDM2022-32, pp. 31-34, June 2022.
Paper # SDM2022-32 
Date of Issue 2022-06-14 (SDM) 
ISSN Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM  
Conference Date 2022-06-21 - 2022-06-21 
Place (in Japanese) (See Japanese page) 
Place (in English) Nagoya Univ. VBL3F 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Material Science and Process Technology for MOS Devices, Memories, and Power Devices 
Paper Information
Registration To SDM 
Conference Code 2022-06-SDM 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Formation of Al(111) Thin Layer on Si(111) and Control of Surface Si Segregation by Thermal Annealing 
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1st Author's Name Taiki Sakai  
1st Author's Affiliation Nagoya University (Nagoya Univ.)
2nd Author's Name Keigo Matsushita  
2nd Author's Affiliation Nagoya University (Nagoya Univ.)
3rd Author's Name Akio Ohta  
3rd Author's Affiliation Nagoya University (Nagoya Univ.)
4th Author's Name Noriyuki Taoka  
4th Author's Affiliation Nagoya University (Nagoya Univ.)
5th Author's Name Katsunori Makihara  
5th Author's Affiliation Nagoya University (Nagoya Univ.)
6th Author's Name Seiichi Miyazaki  
6th Author's Affiliation Nagoya University (Nagoya Univ.)
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Date Time 2022-06-21 17:40:00 
Presentation Time 20 minutes 
Registration for SDM 
Paper # SDM2022-32 
Volume (vol) vol.122 
Number (no) no.84 
Page pp.31-34 
#Pages
Date of Issue 2022-06-14 (SDM) 


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