Paper Abstract and Keywords |
Presentation |
2022-06-23 13:50
Shape tolerance analyes of three-dimensional fine-defect discrimination on dielectric surface using optical linear discrimination analysis Shingo Shimada, Jun-ichiro Sugisaka, Koichi Hirayama, Takashi Yasui (Kitami Inst.Tech.) EMT2022-5 |
Abstract |
(in Japanese) |
(See Japanese page) |
(in English) |
Measurement of a fine defect on a dielectric substrate is difficult because the relationship between the defect shape and the scattered waves is considerably complicated. In this study, we design a computer-generated hologram to discriminate concave defects from convex defects. The hologram operates Fisher's linear discrimination for the scattered wave from the defect. The defect type can be identified from the irradiance of the light wave after passing through the hologram. Compared to conventional optical systems without holograms, the proposed system achieves high discrimination accuracy. We also examine discrimination of the different shape of defects that are not included in the training data of the hologram. |
Keyword |
(in Japanese) |
(See Japanese page) |
(in English) |
inverse-scattering analysis / optical measurement / computer-generated hologram / Fisher’s linear discriminant analysis / / / / |
Reference Info. |
IEICE Tech. Rep., vol. 122, no. 87, EMT2022-5, pp. 25-30, June 2022. |
Paper # |
EMT2022-5 |
Date of Issue |
2022-06-16 (EMT) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
Download PDF |
EMT2022-5 |
Conference Information |
Committee |
EMT IEE-EMT |
Conference Date |
2022-06-23 - 2022-06-23 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
The Institute of Electrical Engineers of Japan |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Electromagnetic Theory, etc. |
Paper Information |
Registration To |
EMT |
Conference Code |
2022-06-EMT-EMT |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
(See Japanese page) |
Title (in English) |
Shape tolerance analyes of three-dimensional fine-defect discrimination on dielectric surface using optical linear discrimination analysis |
Sub Title (in English) |
|
Keyword(1) |
inverse-scattering analysis |
Keyword(2) |
optical measurement |
Keyword(3) |
computer-generated hologram |
Keyword(4) |
Fisher’s linear discriminant analysis |
Keyword(5) |
|
Keyword(6) |
|
Keyword(7) |
|
Keyword(8) |
|
1st Author's Name |
Shingo Shimada |
1st Author's Affiliation |
Kitami Institute of Technology (Kitami Inst.Tech.) |
2nd Author's Name |
Jun-ichiro Sugisaka |
2nd Author's Affiliation |
Kitami Institute of Technology (Kitami Inst.Tech.) |
3rd Author's Name |
Koichi Hirayama |
3rd Author's Affiliation |
Kitami Institute of Technology (Kitami Inst.Tech.) |
4th Author's Name |
Takashi Yasui |
4th Author's Affiliation |
Kitami Institute of Technology (Kitami Inst.Tech.) |
5th Author's Name |
|
5th Author's Affiliation |
() |
6th Author's Name |
|
6th Author's Affiliation |
() |
7th Author's Name |
|
7th Author's Affiliation |
() |
8th Author's Name |
|
8th Author's Affiliation |
() |
9th Author's Name |
|
9th Author's Affiliation |
() |
10th Author's Name |
|
10th Author's Affiliation |
() |
11th Author's Name |
|
11th Author's Affiliation |
() |
12th Author's Name |
|
12th Author's Affiliation |
() |
13th Author's Name |
|
13th Author's Affiliation |
() |
14th Author's Name |
|
14th Author's Affiliation |
() |
15th Author's Name |
|
15th Author's Affiliation |
() |
16th Author's Name |
|
16th Author's Affiliation |
() |
17th Author's Name |
|
17th Author's Affiliation |
() |
18th Author's Name |
|
18th Author's Affiliation |
() |
19th Author's Name |
|
19th Author's Affiliation |
() |
20th Author's Name |
|
20th Author's Affiliation |
() |
Speaker |
Author-1 |
Date Time |
2022-06-23 13:50:00 |
Presentation Time |
25 minutes |
Registration for |
EMT |
Paper # |
EMT2022-5 |
Volume (vol) |
vol.122 |
Number (no) |
no.87 |
Page |
pp.25-30 |
#Pages |
6 |
Date of Issue |
2022-06-16 (EMT) |