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| Presentation | 2022-10-19 14:05 Evaluation and analysis of ferroelectric BiFeO3 thin film surface Fuminobu Imaizumi (NIT, Oyama)  SDM2022-58 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | Devices and sensors using ferroelectric and piezoelectric materials are currently used in various fields, but Pb(Zr,Ti)O3, the main material used, contains lead, and alternative materials are required. We have investigated the fundamental properties of BiFeO3 (BFO) thin films, a lead-free piezoelectric material, deposited by RF sputtering. In this study, BFO films were deposited and annealed at 600°C for 30 minutes, and the growth of BFO grains was confirmed by SEM observation of the surfaces. XRD measurements confirmed the orientation of the crystallized BFO. Furthermore, a sample with a cantilever beam structure was prepared, and when a voltage was applied to the BFO thin film, deformation of the sample due to the inverse piezoelectric effect was confirmed. These experimental results show that BFO can be used as a piezoelectric material to replace PZT in the future, because the inverse piezoelectric effect was obtained by crystallization of BFO thin film. Furthermore, based on the simulation analysis results, the deformation of PZT currently in use due to the inverse piezoelectric effect was calculated, and the performance required when BFO is used as an alternative material to PZT was found. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Ferroelectric material / Piezoelectric material / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 122, no. 215, SDM2022-58, pp. 16-19, Oct. 2022. | |
| Paper # | SDM2022-58 | |
| Date of Issue | 2022-10-12 (SDM) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2022-58 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2022-10-19 - 2022-10-19 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2022-10-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Evaluation and analysis of ferroelectric BiFeO3 thin film surface |
| Sub Title (in English) | |
| Keyword(1) | Ferroelectric material |
| Keyword(2) | Piezoelectric material |
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| 1st Author's Name | Fuminobu Imaizumi |
| 1st Author's Affiliation | National Institute of Technology, Oyama College (NIT, Oyama) |
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| Speaker | Author-1 |
| Date Time | 2022-10-19 14:05:00 |
| Presentation Time | 25 minutes |
| Registration for | SDM |
| Paper # | SDM2022-58 |
| Volume (vol) | vol.122 |
| Number (no) | no.215 |
| Page | pp.16-19 |
| #Pages | 4 |
| Date of Issue | 2022-10-12 (SDM) |
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