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| Presentation | 2022-11-10 13:00 [Invited Talk] GPGPU acceleration of Monte Carlo ion implantation -- for high energy implantation -- Fumie Machida, Hiroo Koshimoto, Yasuyuki Kayama (SRJ), Alexander Schmidt, Inkook Jang (SEC), Satoru Yamada (SRJ), Dae Sin Kim (SEC)  SDM2022-66 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | (Not available yet) | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | / / / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 122, no. 247, SDM2022-66, pp. 13-13, Nov. 2022. | |
| Paper # | SDM2022-66 | |
| Date of Issue | 2022-11-03 (SDM) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | SDM2022-66 |
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| Conference Information | |
| Committee | SDM |
| Conference Date | 2022-11-10 - 2022-11-11 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process, Device, Circuit simulation, etc. |
| Paper Information | |
| Registration To | SDM |
| Conference Code | 2022-11-SDM |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | GPGPU acceleration of Monte Carlo ion implantation |
| Sub Title (in English) | for high energy implantation |
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| 1st Author's Name | Fumie Machida |
| 1st Author's Affiliation | Samsung R&D Institute Japan Co., Ltd. (SRJ) |
| 2nd Author's Name | Hiroo Koshimoto |
| 2nd Author's Affiliation | Samsung R&D Institute Japan Co., Ltd. (SRJ) |
| 3rd Author's Name | Yasuyuki Kayama |
| 3rd Author's Affiliation | Samsung R&D Institute Japan Co., Ltd. (SRJ) |
| 4th Author's Name | Alexander Schmidt |
| 4th Author's Affiliation | Samsung Electronics, Co.., Ltd. (SEC) |
| 5th Author's Name | Inkook Jang |
| 5th Author's Affiliation | Samsung Electronics, Co.., Ltd. (SEC) |
| 6th Author's Name | Satoru Yamada |
| 6th Author's Affiliation | Samsung R&D Institute Japan Co., Ltd. (SRJ) |
| 7th Author's Name | Dae Sin Kim |
| 7th Author's Affiliation | Samsung Electronics, Co.., Ltd. (SEC) |
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| Speaker | Author-1 |
| Date Time | 2022-11-10 13:00:00 |
| Presentation Time | 60 minutes |
| Registration for | SDM |
| Paper # | SDM2022-66 |
| Volume (vol) | vol.122 |
| Number (no) | no.247 |
| Page | p.13 |
| #Pages | 1 |
| Date of Issue | 2022-11-03 (SDM) |
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