Paper Abstract and Keywords |
Presentation |
2023-04-22 16:10
Development of wafer temperature measurement system for non-contact temperature measurement during plasma process Ryunosuke Goto, Kenshiro Horiuchi, Jiawen Yu, Hiroaki Hanafusa, Seiichiro Higashi (Hiroshima Univ.) SDM2023-17 OME2023-17 |
Abstract |
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(See Japanese page) |
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Reference Info. |
IEICE Tech. Rep., vol. 123, no. 8, SDM2023-17, pp. 63-66, April 2023. |
Paper # |
SDM2023-17 |
Date of Issue |
2023-04-14 (SDM, OME) |
ISSN |
Online edition: ISSN 2432-6380 |
Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) |
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SDM2023-17 OME2023-17 |
Conference Information |
Committee |
SDM OME |
Conference Date |
2023-04-21 - 2023-04-22 |
Place (in Japanese) |
(See Japanese page) |
Place (in English) |
Okinawaken Seinen Kaikan |
Topics (in Japanese) |
(See Japanese page) |
Topics (in English) |
Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc. |
Paper Information |
Registration To |
SDM |
Conference Code |
2023-04-SDM-OME |
Language |
Japanese |
Title (in Japanese) |
(See Japanese page) |
Sub Title (in Japanese) |
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Title (in English) |
Development of wafer temperature measurement system for non-contact temperature measurement during plasma process |
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1st Author's Name |
Ryunosuke Goto |
1st Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
2nd Author's Name |
Kenshiro Horiuchi |
2nd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
3rd Author's Name |
Jiawen Yu |
3rd Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
4th Author's Name |
Hiroaki Hanafusa |
4th Author's Affiliation |
Hiroshima University (Hiroshima Univ.) |
5th Author's Name |
Seiichiro Higashi |
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Hiroshima University (Hiroshima Univ.) |
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Speaker |
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Date Time |
2023-04-22 16:10:00 |
Presentation Time |
25 minutes |
Registration for |
SDM |
Paper # |
SDM2023-17, OME2023-17 |
Volume (vol) |
vol.123 |
Number (no) |
no.8(SDM), no.9(OME) |
Page |
pp.63-66 |
#Pages |
4 |
Date of Issue |
2023-04-14 (SDM, OME) |
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