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Paper Abstract and Keywords
Presentation 2023-04-22 16:10
Development of wafer temperature measurement system for non-contact temperature measurement during plasma process
Ryunosuke Goto, Kenshiro Horiuchi, Jiawen Yu, Hiroaki Hanafusa, Seiichiro Higashi (Hiroshima Univ.) SDM2023-17 OME2023-17
Abstract (in Japanese) (See Japanese page) 
(in English) (Not available yet)
Keyword (in Japanese) (See Japanese page) 
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Reference Info. IEICE Tech. Rep., vol. 123, no. 8, SDM2023-17, pp. 63-66, April 2023.
Paper # SDM2023-17 
Date of Issue 2023-04-14 (SDM, OME) 
ISSN Online edition: ISSN 2432-6380
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All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
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Conference Information
Committee SDM OME  
Conference Date 2023-04-21 - 2023-04-22 
Place (in Japanese) (See Japanese page) 
Place (in English) Okinawaken Seinen Kaikan 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc. 
Paper Information
Registration To SDM 
Conference Code 2023-04-SDM-OME 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of wafer temperature measurement system for non-contact temperature measurement during plasma process 
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1st Author's Name Ryunosuke Goto  
1st Author's Affiliation Hiroshima University (Hiroshima Univ.)
2nd Author's Name Kenshiro Horiuchi  
2nd Author's Affiliation Hiroshima University (Hiroshima Univ.)
3rd Author's Name Jiawen Yu  
3rd Author's Affiliation Hiroshima University (Hiroshima Univ.)
4th Author's Name Hiroaki Hanafusa  
4th Author's Affiliation Hiroshima University (Hiroshima Univ.)
5th Author's Name Seiichiro Higashi  
5th Author's Affiliation Hiroshima University (Hiroshima Univ.)
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Date Time 2023-04-22 16:10:00 
Presentation Time 25 minutes 
Registration for SDM 
Paper # SDM2023-17, OME2023-17 
Volume (vol) vol.123 
Number (no) no.8(SDM), no.9(OME) 
Page pp.63-66 
#Pages
Date of Issue 2023-04-14 (SDM, OME) 


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