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| Presentation | 2023-07-21 13:25 Development of new method for evaluating electromechanical coupling coefficient using Mason’s equivalent circuit model simulation Yohkoh Shimano (Waseda Univ.), Kohei Yatabe (Tokyo Univ. of Agri. and Tech.), Takahiko Yanagitani (Waseda Univ.)  EMT2023-56 MW2023-74 OPE2023-56 EST2023-56 MWPTHz2023-52 |
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| Abstract | (in Japanese) | (See Japanese page) |
| (in English) | The electromechanical coupling coefficient is one of the important parameters for determining the performances of RF filters, such as insertion loss and bandwidth. In terms of BAW devices, heavy metal (e.g., Mo or Ru) is used for electrodes to improve an effective electromechanical coupling coefficient keff2. However, in piezoelectric thin film/substrate structure (HBAR), a method for extracting keff2 including electrode effects has not been reported yet. In this study, we propose a new method for producing pseudo FBAR data from experimental data of HBAR without substrate removal but by using signal processing. In this new method, we can directly evaluate keff2 of HBAR using the resonance-antiresonance method. | |
| Keyword | (in Japanese) | (See Japanese page) |
| (in English) | Piezoelectric material / BAW / Electromechanical coupling coefficient / / / / / | |
| Reference Info. | IEICE Tech. Rep., vol. 123, no. 117, EST2023-56, pp. 241-242, July 2023. | |
| Paper # | EST2023-56 | |
| Date of Issue | 2023-07-13 (EMT, MW, OPE, EST, MWPTHz) | |
| ISSN | Online edition: ISSN 2432-6380 | |
| Copyright and reproduction |
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034) | |
| Download PDF | EMT2023-56 MW2023-74 OPE2023-56 EST2023-56 MWPTHz2023-52 |
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| Conference Information | |
| Committee | EST MW EMT OPE MWPTHz IEE-EMT |
| Conference Date | 2023-07-20 - 2023-07-21 |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Muroran Institute of Technology |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Workshop on Optical and Microwave technologies |
| Paper Information | |
| Registration To | EST |
| Conference Code | 2023-07-EST-MW-EMT-OPE-MWPTHz-EMT |
| Language | Japanese |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of new method for evaluating electromechanical coupling coefficient using Mason’s equivalent circuit model simulation |
| Sub Title (in English) | |
| Keyword(1) | Piezoelectric material |
| Keyword(2) | BAW |
| Keyword(3) | Electromechanical coupling coefficient |
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| 1st Author's Name | Yohkoh Shimano |
| 1st Author's Affiliation | Waseda University (Waseda Univ.) |
| 2nd Author's Name | Kohei Yatabe |
| 2nd Author's Affiliation | Tokyo University of Agriculture and Technology (Tokyo Univ. of Agri. and Tech.) |
| 3rd Author's Name | Takahiko Yanagitani |
| 3rd Author's Affiliation | Waseda University (Waseda Univ.) |
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| Speaker | Author-1 |
| Date Time | 2023-07-21 13:25:00 |
| Presentation Time | 25 minutes |
| Registration for | EST |
| Paper # | EMT2023-56, MW2023-74, OPE2023-56, EST2023-56, MWPTHz2023-52 |
| Volume (vol) | vol.123 |
| Number (no) | no.114(EMT), no.115(MW), no.116(OPE), no.117(EST), no.118(MWPTHz) |
| Page | pp.241-242 |
| #Pages | 2 |
| Date of Issue | 2023-07-13 (EMT, MW, OPE, EST, MWPTHz) |
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