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Paper Abstract and Keywords
Presentation 2023-07-21 13:25
Development of new method for evaluating electromechanical coupling coefficient using Mason’s equivalent circuit model simulation
Yohkoh Shimano (Waseda Univ.), Kohei Yatabe (Tokyo Univ. of Agri. and Tech.), Takahiko Yanagitani (Waseda Univ.) EMT2023-56 MW2023-74 OPE2023-56 EST2023-56 MWPTHz2023-52
Abstract (in Japanese) (See Japanese page) 
(in English) The electromechanical coupling coefficient is one of the important parameters for determining the performances of RF filters, such as insertion loss and bandwidth. In terms of BAW devices, heavy metal (e.g., Mo or Ru) is used for electrodes to improve an effective electromechanical coupling coefficient keff2. However, in piezoelectric thin film/substrate structure (HBAR), a method for extracting keff2 including electrode effects has not been reported yet. In this study, we propose a new method for producing pseudo FBAR data from experimental data of HBAR without substrate removal but by using signal processing. In this new method, we can directly evaluate keff2 of HBAR using the resonance-antiresonance method.
Keyword (in Japanese) (See Japanese page) 
(in English) Piezoelectric material / BAW / Electromechanical coupling coefficient / / / / /  
Reference Info. IEICE Tech. Rep., vol. 123, no. 117, EST2023-56, pp. 241-242, July 2023.
Paper # EST2023-56 
Date of Issue 2023-07-13 (EMT, MW, OPE, EST, MWPTHz) 
ISSN Online edition: ISSN 2432-6380
All rights are reserved and no part of this publication may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopy, recording, or any information storage and retrieval system, without permission in writing from the publisher. Notwithstanding, instructors are permitted to photocopy isolated articles for noncommercial classroom use without fee. (License No.: 10GA0019/12GB0052/13GB0056/17GB0034/18GB0034)
Download PDF EMT2023-56 MW2023-74 OPE2023-56 EST2023-56 MWPTHz2023-52

Conference Information
Conference Date 2023-07-20 - 2023-07-21 
Place (in Japanese) (See Japanese page) 
Place (in English) Muroran Institute of Technology 
Topics (in Japanese) (See Japanese page) 
Topics (in English) Workshop on Optical and Microwave technologies 
Paper Information
Registration To EST 
Conference Code 2023-07-EST-MW-EMT-OPE-MWPTHz-EMT 
Language Japanese 
Title (in Japanese) (See Japanese page) 
Sub Title (in Japanese) (See Japanese page) 
Title (in English) Development of new method for evaluating electromechanical coupling coefficient using Mason’s equivalent circuit model simulation 
Sub Title (in English)  
Keyword(1) Piezoelectric material  
Keyword(2) BAW  
Keyword(3) Electromechanical coupling coefficient  
1st Author's Name Yohkoh Shimano  
1st Author's Affiliation Waseda University (Waseda Univ.)
2nd Author's Name Kohei Yatabe  
2nd Author's Affiliation Tokyo University of Agriculture and Technology (Tokyo Univ. of Agri. and Tech.)
3rd Author's Name Takahiko Yanagitani  
3rd Author's Affiliation Waseda University (Waseda Univ.)
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Speaker Author-1 
Date Time 2023-07-21 13:25:00 
Presentation Time 25 minutes 
Registration for EST 
Paper # EMT2023-56, MW2023-74, OPE2023-56, EST2023-56, MWPTHz2023-52 
Volume (vol) vol.123 
Number (no) no.114(EMT), no.115(MW), no.116(OPE), no.117(EST), no.118(MWPTHz) 
Page pp.241-242 
Date of Issue 2023-07-13 (EMT, MW, OPE, EST, MWPTHz) 

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